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US 2021/0347093 A1Published application
Master, method of manufacturing master, and method of manufacturing transferred object
AssigneeDexerials Corporation
InventorShunichi KAJIYA
Life of this patent
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Abstract
To manufacture a transferred object in which a transfer failure is restrained with higher efficiency. Provided is a master including a base material, a pattern layer provided on one surface of the base material, a micro concave-convex structure being formed in the pattern layer, and an absorption layer provided to be sandwiched between the base material and the pattern layer, and having a light absorption coefficient larger than a light absorption coefficient of the pattern layer.
Claims13
A master comprising:
- a base material;
- a pattern layer provided on one surface of the base material, a micro concave-convex structure being formed in the pattern layer;
- and
- an absorption layer provided to be sandwiched between the base material and the pattern layer, and having a light absorption coefficient larger than a light absorption coefficient of the pattern layer.
1 more element
A method of manufacturing a master, comprising:
- forming an absorption layer on one surface of a base material;
- and
- forming a pattern layer on the absorption layer, the pattern layer having a light absorption coefficient smaller than a light absorption coefficient of the absorption layer, a micro concave-convex structure being formed in the pattern layer.
Dependencies are inferred from the claim text.