# US 2021/0343602 A1 · Fabrication of thin-film encapsulation layer for light-emitting device

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- Number: US 2021/0343602 A1
- Document ID: US20210343602A1
- Status: Published application
- Kind: A1
- Application number: 17/305,963
- Filed: 2021-07-19
- Published: 2021-11-04
- Earliest claimed: 2013-12-12
- Assignees: Kateeva, Inc.
- Applicants: Kateeva, Inc.
- Inventors: Eliyahu Vronsky; Nahid Harjee
- Web page: https://patentgrep.com/patent/US20210343602A1

## CPC

- B41J 2/2054: {by the variation of dot disposition or characteristics, e.g. dot number density, dot shape}
- B05C 11/10: Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material {(B05C1/0813, B05C5/0225, B05C17/002 and B05C19/06 take precedence)}
- B41J 2/01: Ink jet
- B41J 2/04581: {controlling heads based on piezoelectric elements}
- B41J 2/21: for multi-colour printing
- B41J 3/407: for marking on special material
- B41M 3/00: Printing processes to produce particular kinds of printed work, e.g. patterns ({printing apparatus or machines of special type or for particular purposes B41F17/00;} special designs or pictures per se B44F; manufacturing printed circuits using printing techniques H05K3/12 {; manufacturing organic semiconductor devices using printing techniques H10K71/13})
- B41M 5/0047: {by ink-jet printing}
- B41M 7/0081: {using electromagnetic radiation or waves, e.g. ultraviolet radiation, electron beams}
- H04N 1/405: Halftoning, i.e. converting the picture signal of a continuous-tone original into a corresponding signal showing only two levels
- H10F 19/80: Encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells
- H10F 77/50: Encapsulations or containers (for photovoltaic modules H10F19/80)
- H10H 20/852: Encapsulations
- H10H 20/853: characterised by their shape
- H10K 71/135: {using ink-jet printing}
- H10K 71/70: Testing, e.g. accelerated lifetime tests
- H10P 14/6346: {using printing, e.g. ink-jet printing}
- H10P 72/0441: {Apparatus for sealing, encapsulating, glassing, decapsulating or the like}
- H10P 74/203: {Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects}
- H10P 74/238: {comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement}
- B41M 7/009: {using thermal means, e.g. infrared radiation, heat}
- H10H 20/0362: {of encapsulations}
- H10H 20/854: characterised by their material, e.g. epoxy or silicone resins
- H10K 50/8445: {multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers}
- H10K 59/1201: {Manufacture or treatment}
- H10K 59/8731: {multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers}
- Y02E 10/549: Organic PV cells
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08)
- B41M: PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING, (correction of typographical errors B41J; processes for applying transfer pictures or the like B44C1/16; fluid media for correction of typographical errors by coating C09D10/00; printing textiles D06P)
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

An ink jet process is used to deposit a material layer to a desired thickness. Layout data is converted to per-cell grayscale values, each representing ink volume to be locally delivered. The grayscale values are used to generate a halftone pattern to deliver variable ink volume (and thickness) to the substrate. The halftoning provides for a relatively continuous layer (e.g., without unintended gaps or holes) while providing for variable volume and, thus, contributes to variable ink/material buildup to achieve desired thickness. The ink is jetted as liquid or aerosol that suspends material used to form the material layer, for example, an organic material used to form an encapsulation layer for a flat panel device. The deposited layer is then cured or otherwise finished to complete the process.

## Claims

### Claim 1

An electronic device, comprising:
a substrate;
an electroluminescent element formed on the substrate; and
a uniform layer formed over an area of the substrate and over the electroluminescent element, the layer having a plurality of thicknesses and comprising:
a plurality of droplets arranged with a first droplet coverage at an edge of the layer to form a frame defining a central area within the frame; and
a plurality of droplets arranged with a second droplet coverage different from the first droplet coverage in the central area, wherein the second droplet coverage is based on a topology of the substrate in the central area.

### Claim 2 (depends on 1)

The electronic device of claim 1, wherein the plurality of droplets arranged with the second droplet coverage are ejected from a plurality of nozzles of a print head of an inkjet printer, and the nozzles are selected to eject the droplets based on the topology of the substrate in the central area.

### Claim 3 (depends on 1)

The electronic device of claim 1, wherein the layer further comprises a plurality of droplets arranged with a third droplet coverage, different from the second droplet coverage, within an intermediate region in the central area adjacent to the frame.

### Claim 4 (depends on 3)

The electronic device of claim 3, wherein the film is an organic polymer.

### Claim 5 (depends on 1)

The electronic device of claim 1, wherein the second droplet coverage is varied by varying a deposition density of the droplets.

### Claim 6 (depends on 2)

The electronic device of claim 2, wherein the second droplet coverage is varied by varying a deposition density of the droplets.

### Claim 7 (depends on 1)

The electronic device of claim 1, wherein the droplets are ejected from a plurality of nozzles of a print head of an inkjet printer, and droplet coverage is defined by a selection of waveforms applied to the nozzles to adjust size of the droplets ejected and by a selection of nozzles of the print head to eject droplets to adjust deposition density of the droplets.

### Claim 8 (depends on 1)

The electronic device of claim 1, wherein the droplets are ejected from a plurality of nozzles of a print head of an inkjet printer, and droplet coverage is defined by a time-dependent frequency of a trigger signal applied to the nozzles.

### Claim 9 (depends on 1)

The electronic device of claim 1, wherein the second droplet coverage is defined by a grayscale that comprises a correction image based on the topology of the substrate in the central area.

### Claim 10 (depends on 1)

The electronic device of claim 1, wherein the second droplet coverage is defined by a pattern of droplets resolved from a correction image based on the topology of the substrate in the central area.

### Claim 11

An electronic device, comprising:
a substrate;
an electroluminescent element formed on the substrate; and
a uniform layer formed over an area of the substrate and over the electroluminescent element, the layer having a plurality of thicknesses defining a frame region, a central region within the frame region, and a buffer region between the frame region and the central region, the layer comprising:
a first plurality of droplets arranged with a first droplet coverage in the frame region;
a second plurality of droplets arranged with a second droplet coverage different from the first droplet coverage in the central region, wherein the second droplet coverage is based on a topology of the substrate in the central region; and
a third plurality of droplets arranged with a third droplet coverage in the buffer region.

### Claim 12 (depends on 11)

The electronic device of claim 11, wherein the droplets are ejected from a plurality of nozzles of a print head of an inkjet printer, and droplet coverage is defined by one or more of:
a selection of nozzles and waveforms that adjust size and deposition density of the droplets;
a time-dependent frequency of a trigger signal for ejecting the droplets; and
a correction image based on a topography of the substrate.

### Claim 13 (depends on 11)

The electronic device of claim 11, wherein the film is an organic polymer.

### Claim 14 (depends on 13)

The electronic device of claim 13, wherein the film is impermeable to oxygen.

### Claim 15 (depends on 11)

The electronic device of claim 11, wherein the film has a planar surface spanning the frame region, the buffer region, and the central region.

### Claim 16 (depends on 11)

The electronic device of claim 11, wherein the film contains photoinitiator residues.

### Claim 17 (depends on 11)

The electronic device of claim 11, wherein the film has a tapered edge.

### Claim 18 (depends on 11)

The electronic device of claim 11, wherein the film comprises alternating organic and inorganic layers.

### Claim 19

An electronic device, comprising:
a substrate;
an electroluminescent element formed on the substrate; and
a uniform layer comprising a plurality of films formed over an area of the substrate and over the electroluminescent element, the layer having a plurality of thicknesses defining a frame region, a central region within the frame region, and a buffer region between the frame region and the central region, the layer comprising:
a first plurality of droplets arranged with a first droplet coverage in the frame region;
a second plurality of droplets arranged with a second droplet coverage different from the first droplet coverage in the central region, wherein the second droplet coverage is based on a topology of the substrate in the central region; and
a third plurality of droplets arranged with a third droplet coverage in the buffer region.

### Claim 20 (depends on 19)

The electronic device of claim 19, wherein the layer contains photoinitiator residues.
