Improved micropump
AssigneeMst Innovation GmbH
InventorsFrank Bartels, Monika Kremer, Florian Siemenroth, Anja Strube
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AssigneeMst Innovation GmbH
InventorsFrank Bartels, Monika Kremer, Florian Siemenroth, Anja Strube
Estimating the term…
The micropump including a pump chamber which can be fluidly filled or emptied both by means of a passage opening and an inlet, the pump chamber being covered with a disk-shaped actuator so that the volume of the pump chamber can be changed by deflecting the actuator, the passage opening being arranged in a side of the pumping chamber opposite the actuator, and the inlet has a smaller or similar flow resistance compared to the through opening. An entrance to the passage opening can be closed by means of the deflected actuator, so that a valve is formed in the basic state, or closed by means of the undeflected actuator, so that a valve is formed in the basic state. The micropump can have a second pump chamber with an actuator and inlet, the passage opening of which is connected to that of the first pump chamber.
Micropump having a small housing size, comprising a pump chamber (21), which can be fluidically filled or emptied by means of a passage opening (4) as well as an inlet (51), wherein the pump chamber (21) is covered with a disk-shaped actuator (11;
Apparatus according to any of the preceding claims,
Micropump according to any of the preceding claims, wherein the pump chamber's (21, 22) side (61), 62) which is opposing to the actuator (11, 12;
Micropump according to any of the preceding claims, wherein the inlet (51, 52) as well is located in the side (61, 62) which is opposing to the actuator (11, 12;
Micropump according to any of the preceding claims, wherein the pump chamber's (21, 22) side (61, 62) which is opposing to the actuator (11, 12;
Micropump according to any of the preceding claims, wherein a housing which comprises the actuators (11, 12;
Micropump according to any of the preceding claims, wherein the same has at least on one of the actuators (11, 12;
Valve system for controlling a fluid flow, comprising the components according to any of the preceding claims, wherein the valve system comprises four stages which are formed by the inlet (51) and the first actuator (11;
Method according to any of claims 20 to 23, wherein the steps
Dependencies are inferred from the claim text.