# US 2021/0340671 A1 · Solid source precursor vessel

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- Number: US 2021/0340671 A1
- Document ID: US20210340671A1
- Status: Published application
- Kind: A1
- Application number: 17/239,768
- Filed: 2021-04-26
- Published: 2021-11-04
- Earliest claimed: 2020-04-29
- Assignees: ASM IP Holding B.V.
- Applicants: ASM IP Holding B.V.
- Inventors: Jianqiu Huang; Ankit Kimtee; Sudhanshu Biyani; Jonathan Robert Bakke; Eric James Shero
- Web page: https://patentgrep.com/patent/US20210340671A1

## CPC

- C23C 16/448: characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C 16/4485: {by evaporation without using carrier gas in contact with the source material (C23C16/4486 takes precedence)}
- C23C 16/44: characterised by the method of coating (C23C16/04 takes precedence)
- C23C 16/4408: {by purging residual gases from the reaction chamber or gas lines}
- C23C 16/45525: {Atomic layer deposition [ALD]}
- C23C 16/45561: {Gas plumbing upstream of the reaction chamber}
- C23C 16/50: using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

The present disclosure is generally directed to a solid source precursor delivery system. More specifically, the present disclosure is directed to a solid source precursor vessel that can be utilized to vaporize a supply of solid precursor stored within the vessel. The disclosed source vessel utilizes a plurality of individual cavities or pockets within the interior of the vessel. Each individual pocket may be loaded with precursor. In an arrangement, the pockets may be loaded with pre-formed blocks of compressed precursor material that typically have a higher density than was previously achieved when packing solid precursor within a source vessel. The increased density of the solid precursor material increases a capacity of the source vessel resulting in longer intervals between replacement and/or refilling the source vessel.

## Claims

### Claim 1

A reactant source vessel comprising:
a container body having an outer sidewall and a bottom surface that define an internal area of the container body;
a plurality of pockets disposed within the internal area of the container body, each of the plurality of pockets configured to contain a volume of a solid source precursor;
a lid configured to engage the container body, the lid enclosing the internal area of the container body when connected to the container body;
a fluid flow path within the internal area of the container body, the fluid flow path being formed above the plurality of pockets and below a bottom surface of the lid, the fluid flow path extending between an inlet end and an outlet end along a path the passes over at least a portion of each of the plurality of pockets.

### Claim 2 (depends on 1)

The vessel of claim 1, further comprising:
an inlet valve and an outlet valve attached to a top surface of the lid, wherein each valve connects to a fluid passage through the lid.

### Claim 3 (depends on 2)

The vessel of claim 2, wherein the inlet valve is in fluid communication with the inlet end of the fluid flow path and the outlet valve is in fluid communication with the outlet end of the fluid flow path, when the lid is connected to the container body.

### Claim 4 (depends on 1)

The vessel of claim 1, wherein each of the plurality of pockets comprises:
a closed bottom end;
an open upper end; and
at least one sidewall surface extending between the closed bottom end and the open upper end, wherein the closed bottom end, the open upper end and the at least one sidewall surface define an interior volume of the pocket.

### Claim 5 (depends on 4)

The vessel of claim 4, wherein each pocket of the plurality of pockets have common dimensions.

### Claim 6 (depends on 4)

The vessel of claim 4, wherein each pocket of the plurality of pockets comprises a rectangular prism.

### Claim 7 (depends on 1)

The vessel of claim 1, further comprising:
an insert configured for disposition within the internal area of the carrier body, wherein the plurality of pockets are formed within the insert.

### Claim 8 (depends on 1)

The vessel of claim 1, wherein the insert comprises at least a first layer and a second layer, wherein the first and second layers are stacked within the internal area of the carrier body to collectively define the plurality of pockets.

### Claim 9 (depends on 1)

The vessel of claim 1, wherein the first and second layers of the insert are formed from a ceramic material.

### Claim 10 (depends on 1)

The vessel of claim 1, wherein the flow path comprises a non-direct flow path between the inlet end and the outlet end.

### Claim 11 (depends on 1)

The vessel of claim 1, further comprising:
a first plurality of parallel dividing walls extending between a first set of opposing sidewalls of the container body; and
a second plurality of parallel dividing walls extending between a second set of opposing sidewalls of the container body, wherein the first and second plurality of dividing walls intersect to define a matrix of the plurality of pockets.

### Claim 12 (depends on 11)

The vessel of claim 11, wherein at least of the first plurality of dividing walls and the second plurality of dividing walls are equally spaced between the first set of opposing sidewalls and the second set of opposing sidewalls, respectively.

### Claim 13 (depends on 11)

The vessel of claim 11, wherein the first and second plurality of dividing walls vary in height to define the fluid flow path between the inlet end and the outlet end.

### Claim 14

A reactant source vessel comprising:
a container body having outer sidewalls and a bottom surface that define an internal area of the container body;
a first plurality of parallel dividing walls extending between a first set of opposing sidewalls of the container body; and
a second plurality of parallel dividing walls extending between a second set of opposing sidewalls of the container body, wherein the first and second plurality of dividing walls intersect to define a matrix of pockets within the internal area of the container body, each of the matrix of pockets configured to contain a volume of a solid source precursor;
a lid having configured to engage the container body, the lid enclosing the internal area of the container body when connected to the container body;
a fluid flow path defined by a bottom surface of the lid, the outer sidewall of the container and the first and second plurality of dividing walls, wherein the fluid flow path extends between an inlet end and an outlet end and passes over an upper surface of each of the matrix of pockets.

### Claim 15 (depends on 14)

The vessel of claim 14, wherein the matrix of pockets each have common dimensions.

### Claim 16 (depends on 14)

The vessel of claim 14, wherein the fluid flow path comprises a non-direct flow path between the inlet end and the outlet end.

### Claim 17 (depends on 14)

The vessel of claim 14, further comprising:
an inlet valve and an outlet valve attached to a top surface of the lid, wherein each valve connects to a fluid passage through the lid and, when the lid is connected to the container body, the inlet valve is in fluid communication with the inlet end of the fluid flow path and the outlet valve is in fluid communication with the outlet end of the fluid flow path.

### Claim 18

A method for use with a reactant source vessel comprising:
accessing an interior area of a container body of the reactant source vessel, wherein the interior area includes a plurality of individual pockets;
inserting preformed blocks of compressed solid precursor into each of the plurality of individual pockets;
attaching a lid to the container body to enclose the interior area;
in conjunction with elevating a temperature of the reactant source vessel, directing a carrier gas through a flow path extending through the interior area of the reactant source vessel between a flow path inlet end and a flow path outlet end, wherein the carrier gas removes vaporized precursor from the vessel.

### Claim 19 (depends on 18)

The method of claim 18, wherein the carrier gas is directed over a top surface of each of the plurality of individual pockets as it passes between the flow path inlet end and the flow path outlet end.

### Claim 20 (depends on 18)

The method of claim 18, wherein the carrier gas is directed over an at least partially serpentine path between the flow path inlet end and the flow path outlet end.