# US 2021/0340666 A1 · Metal plate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2021/0340666 A1 - Document ID: US20210340666A1 - Status: Published application - Kind: A1 - Application number: 17/305,870 - Filed: 2021-07-16 - Published: 2021-11-04 - Earliest claimed: 2013-10-15 - Assignees: Dai Nippon Printing Co., Ltd. - Applicants: Dai Nippon Printing Co., Ltd. - Inventors: Chikao IKENAGA; Isao MIYATANI - Web page: https://patentgrep.com/patent/US20210340666A1 ## CPC - C23C 14/042: {using masks} - C21D 6/001: {containing Ni (C21D6/004 takes precedence)} - C23F 1/00: Etching metallic material by chemical means (manufacture of printing surfaces B41C; manufacture of printed circuits H05K) - C23F 1/02: Local etching - C23F 1/04: Chemical milling - C23F 1/28: for etching iron group metals - C21D 8/00: Modifying the physical properties of ferrous metals or ferrous alloys by deformation combined with, or followed by, heat treatment (hardening articles or materials formed by forging or rolling with no further heating beyond that required for the formation C21D1/02) - C21D 2261/00: Machining or cutting being involved - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - C21D: MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING (surface treatment of metallic material involving at least one process provided for in class C23 and at least one process covered by this subclass C23F17/00; unidirectional solidification of eutectic materials or unidirectional demixing of eutectoid materials C30B) - C23F: NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE (working metal by laser beams B23K26/00; desurfacing by applying flames B23K7/00; working of metal by electro-erosion B23H; producing decorative effects by removing surface material, e.g. by engraving, by etching, B44C1/22; electrolytic etching or polishing C25F); INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 ## Abstract The object of the present invention is to provide a metal plate capable of manufacturing a deposition mask in which dispersion of positions of through-holes is restrained. A thermal recovery rate is defined as parts per million of a difference a distance between to measurement points on a sample before a heat treatment and a distance therebetween after the heat treatment, relative to the distance therebetween before the heat treatment. In this case, an average value of the thermal recovery rates of the respective samples is not less than −10 ppm and not more than +10 ppm, and (2) a dispersion of the thermal recovery rates of the respective samples is not more than 20 ppm. ## Claims ### Claim 1 A method of inspecting a metal plate to be used for manufacturing a deposition mask by forming a plurality of through-holes in the metal plate, the method comprising: obtaining a plurality of samples from the metal plate; measuring a distance L1 between two measurement points on each sample before a heat treatment; measuring a distance L2 between the two measurement points on each sample after the heat treatment; a step of judging whether the following conditions (1) and (2) are satisfied: (1) an average value of a thermal recovery rates of the respective samples is not less than −10 ppm and not more than +10 ppm; and (2) a dispersion of the thermal recovery rates of the respective samples is not more than 20 ppm; wherein the thermal recovery rate F of each sample is defined by the following expression: F={(L1−L2)/L1}×106 (ppm), wherein the samples are obtained by cutting at least one sample metal plate, which is obtained by cutting the metal plate along a width direction of the metal plate, into two or more samples along a longitudinal direction of the metal plate; wherein the two measurement points on each sample are aligned along the longitudinal direction of the metal plate; wherein the heat treatment includes a first step of increasing a temperature of each sample from 25° C. to 300° C. for 30 minutes, a second step of keeping the temperature of each sample at 300° C. for 5 minutes, and a third step of decreasing the temperature of each sample from 300° C. to 25° C. for 60 minutes; and wherein the dispersion of the thermal recovery rates is a value obtained by multiplying a standard deviation of the thermal recovery rates of the respective samples by a factor of 3. ### Claim 2 (depends on 1) The method of inspecting a metal plate according to claim 1, wherein the metal plate includes an invar alloy. ### Claim 3 (depends on 1) The method of inspecting a metal plate according to claim 1, wherein the thickness of the metal plate is not more than 0.100 mm.