Vibration element, vibrator, and method for producing vibration element
AssigneeMurata Manufacturing Co., Ltd.
InventorsToru Kizu, Hiroshi Kumano, Koki Sai
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AssigneeMurata Manufacturing Co., Ltd.
InventorsToru Kizu, Hiroshi Kumano, Koki Sai
Estimating the term…
A vibrator, a vibrating element and a method for producing the vibrating element may include vibrating piece having a central portion and a peripheral portion. The vibrator, the vibrating element and the method may further include a pair of excitation electrodes provided on a first side and a second side of a main surface of the central portion. The vibrator, the vibrating element and the method may further include a pair of connection electrodes provided on the peripheral portion and electrically connected to the pair of excitation electrodes. The vibrator, the vibrating element and the method may further include a substrate configured to be connected to the pair of connection electrodes via an electrically-conductive holding member interposed therebetween and configured to support the vibration element in an excitable manner.
A vibrator comprising:
A method for producing a vibration element including a vibrating piece having a central portion and a peripheral portion, wherein a thickness of the peripheral portion is smaller than a thickness of the central portion, a pair of excitation electrodes provided on a first side and a second side of a main surface of the central portion, respectively, and a pair of connection electrodes provided on the peripheral portion and electrically connected to the pair of excitation electrodes, the method comprising:
A vibration element comprising:
Dependencies are inferred from the claim text.