Piping system and processing apparatus
AssigneeTokyo Electron Limited
InventorsKazuki HOSHI, Koji YAMAGISHI
Life of this patent
Estimating the term…
Abstract
A piping system includes: pipes, each of which is covered with a heat-insulating member and through which a cooling medium flows; and a heat transfer member arranged between two heat-insulating members of two of the pipes adjacent to each other. The heat transfer member includes: a contact portion configured to be in contact with the two heat-insulating members; and a heat-receiving portion including a heat-receiving surface configured to be in contact with outside air outside of the pipes, and configured to transfer heat, which is received from the outside air on the heat-receiving surface, to the contact portion.
Claims15
A piping system comprising:
- pipes, each of which is covered with a heat-insulating member and through which a cooling medium flows;
- and
- a heat transfer member arranged between two heat-insulating members of two of the pipes adjacent to each other,
- wherein the heat transfer member includes:
- a contact portion configured to be in contact with the two heat-insulating members;
- and
- a heat-receiving portion including a heat-receiving surface configured to be in contact with outside air outside of the pipes, and configured to transfer heat, which is received from the outside air on the heat-receiving surface, to the contact portion.
A processing apparatus comprising:
- a processing container in which a workpiece is processed;
- a heat exchanger installed in the processing container and configured to perform heat exchange between a cooling medium flowing through the heat exchanger and the workpiece;
- a supplier configured to supply the cooling medium to the heat exchanger;
- pipes connected to the heat exchanger and the supplier, through which the cooling medium flows, each of the pipes being covered with a heat-insulating member;
- and
- a heat transfer member arranged between two heat-insulating members of two of the pipes adjacent to each other,
- wherein the heat transfer member includes:
- a contact portion configured to be in contact with the two heat-insulating members;
- and
- a heat-receiving portion including a heat-receiving surface configured to be in contact with outside air outside of the pipes, and configured to transfer heat, which is received from the outside air on the heat-receiving surface, to the contact portion.
Dependencies are inferred from the claim text.