# US 2021/0332196 A1 · Surface treatment method of a polymer for 5g

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- Number: US 2021/0332196 A1
- Document ID: US20210332196A1
- Status: Published application
- Kind: A1
- Application number: 16/933,116
- Filed: 2020-07-20
- Published: 2021-10-28
- Earliest claimed: 2020-04-28
- Assignees: Beijing Normal University; Guangdong Guangxin Ion Beam Technology Co., Ltd.
- Applicants: Beijing Normal University; Guangdong Guangxin Ion Beam Technology Co., Ltd.
- Inventors: Bin LIAO; Xiao OUYANG; Guoliang WANG; Xiaoping OUYANG; Jun LUO; Pan PANG; Lin CHEN; Xu ZHANG; Xianying WU; Minju YING
- Web page: https://patentgrep.com/patent/US20210332196A1

## CPC

- C08J 3/20: Compounding polymers with additives, e.g. colouring
- C08J 7/123: {Treatment by wave energy or particle radiation (C08J7/18 takes precedence)}
- C08J 2327/18: Homopolymers or copolymers of tetrafluoroethylene
- C08J 2367/02: Polyesters derived from dicarboxylic acids and dihydroxy compounds; (C08J2367/06 takes precedence)
- C08J 2379/08: Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08J: WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H (working, e.g. shaping, of plastics B29)

## Abstract

The present application discloses a surface treatment method of a polymer for 5G, belonging to the technical field of surface treatment of polymer. By injecting and adding the oxygen elements to the polymer, the polymer matrix elements and the injected atoms can form a blend structure, which can increase the surface roughness of the polymer, improve its bonding strength with the metal, and thus enhance its anti-peel strength. The surface treatment method of the application has the surface resistivity, surface roughness, water absorption and tensile properties of the polymer all considered. The equipment used in the invention has long service life and low cost, and can realize large-scale roll-to-roll production. The method can be popularized in polymer surface treatment.

## Claims

### Claim 1

A surface treatment method of a polymer for 5G, comprising the steps of:
S1. using a Penning ion source to proceed oxygen insertion on the surface of the polymer, controlling the roughness of the polymer surface to change less than or equal to 0.1 μm, obtaining a first polymer;
S2. using a Kaufman ion source to proceed oxygen addition on the surface of the first polymer, controlling the roughness of the first polymer surface to change less than or equal to 0.1 μm, obtaining a second polymer;
S3. using a Hall ion source to proceed hydrogen abstraction on the surface of the second polymer, obtaining a third polymer;
S4. when the surface roughness of the third polymer is greater than 0.4 μm or less than 0.1 μm, repeating S1˜S3 until the surface roughness of the third polymer is 0.1˜0.4 μm.

### Claim 2 (depends on 1)

The surface treatment method according to claim 1, wherein the polymer in S1 is selected from polyimide, liquid crystalline polymer, modified polyimide, polyethylene terephthalate and polytetrafluoroethylene.

### Claim 3 (depends on 1)

The surface treatment method according to claim 1, wherein the oxygen insertion in S1 has an oxygen flow ranging from 5 sccm to 80 sccm, a voltage ranging from 20 KV to 40 KV, and a beam intensity ranging from 1 mA to 50 mA.

### Claim 4 (depends on 1)

The surface treatment method according to claim 1, wherein the oxygen addition in S2 has an oxygen flow ranging from 20 sccm to 100 sccm, a voltage ranging from 10 KV to 20 KV, and a beam intensity ranging from 5 mA to 150 mA.

### Claim 5 (depends on 1)

The surface treatment method according to claim 1, wherein the hydrogen abstraction has an argon flow ranging from 50 sccm to 150 sccm, a voltage ranging from 0.1 KV to 1 KV, and a beam intensity ranging from 200 mA to 1000 mA.

### Claim 6

(canceled)

### Claim 7 (depends on 1)

The surface treatment method according to claim 1, wherein the polymer after the surface treatment has a dielectric constant greater than 3.0, a surface water absorption greater than 10%, a surface resistance greater than 1014Ω, a surface roughness ranging from 0.1 μm to 0.4 μm, a hydrophilic contact angle ranging from 40o to 80o, a 5 GHz high frequency dielectric loss equal to or less than 0.004.

### Claim 8 (depends on 1)

The surface treatment method according to claim 1, wherein when the second polymer has a surface resistance greater than 1015Ω, returning to S1, until the surface resistance is less than or equal to 1015Ω.

### Claim 9 (depends on 8)

The surface treatment method according to claim 8, wherein the oxygen insertion in S1 has an oxygen flow ranging from 5 sccm to 80 sccm, a voltage ranging from 20 KV to 40 KV, and a beam intensity ranging from 1 mA to 50 mA.