LOCALIZED STRAIN FIELDS IN EPITAXIAL LAYER OVER cREO

A method of forming a layered structure for transmission of an acoustic wave, the method comprising:

• providing a substrate layer;
• etching a surface of the substrate layer to form a second layer over the substrate layer, the second layer comprising a plurality of discrete portions adjacent to each other, each discrete portion of the plurality of discrete portions comprising a first subregion and a second subregion, wherein the first subregion forms a void;
• depositing a material into the void of the first subregion of the second layer, to form localized stress in the second layer;
• and
• growing an epitaxial layer over the second layer, for transmission of the acoustic wave,
• wherein, when an acoustic wave is to be transmitted through the epitaxial layer, a periodicity (λ) of a wavelength of the acoustic wave is matched to a sum of a width (dA) of the first subregion and a width (dB) of the second subregion.

A method of forming a layered structure for transmission of an acoustic wave, the method comprising:

• providing a substrate layer;
• depositing a second layer over the substrate layer, the second layer comprising a plurality of discrete second subregions adjacent to each other with voids between them;
• depositing a material into the voids to form first subregions of the second layer, to provide localized stress in the second layer;
• and
• growing an epitaxial layer over the second layer, for transmission of the acoustic wave,
• wherein, when an acoustic wave is to be transmitted through the epitaxial layer, a periodicity (λ) of a wavelength of the acoustic wave is matched to a sum of a width (dA) of the first subregion and a width (dB) of the second subregion.