Nitrogen Injection for ARC Lamps
AssigneesMattson Technology, Inc., Beijing E-Town Semiconductor Technology Co., Ltd.
InventorsRolf Bremensdorfer, Dave Camm, Pete Lembesis, Joseph Cibere
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Abstract
Systems and methods for reducing contamination of one or more arc lamps are provided. One example implementation is directed to a millisecond anneal system. The millisecond anneal system includes a processing chamber for thermally treating a substrate using a millisecond anneal process. The system further includes one or more arc lamps. Each of the one or more arc lamps is coupled to a water loop for circulating water through the arc lamp during operation of the arc lamp. The system includes a reagent injection source configured to introduce a reagent, such as nitrogen gas, into water circulating through the arc lamp during operation of the arc lamp.
Claims15
A millisecond anneal system, comprising:
- a processing chamber for thermally treating a substrate using a millisecond anneal process;
- one or more arc lamps, each of the one or more arc lamps coupled to a water loop for circulating water through the arc lamp during operation the arc lamp;
- wherein the system comprises a nitrogen gas injection source configured to introduce nitrogen gas into water circulating through the arc lamp during operation of the arc lamp.
-17. (canceled)
An arc lamp system, comprising:
- a plurality of electrodes;
- one or more inlets to an arc tube configured to receive water from a water loop to be circulated through the arc lamp during operation, the one or one or more inlets configured to receive a gas, wherein during operation of the arc lamp, the gas is converted into a plasma during an arc discharge between the plurality of electrodes;
- and
- wherein the water loop comprises a valve for injection of a reagent the arc lamp during operation to reduce a deposit of contaminants on the arc lamp.
The arc lamp system of claim 17, wherein the reagent is nitrogen gas.
The arc lamp system of claim 17, wherein the reagent is an acid.
Dependencies are inferred from the claim text.