Back to results
US 2021/0305010 A1Published application
Methods and systems for acquiring 3d diffraction data
AssigneeFEI Company
InventorsBart Buijsse, Alexander Henstra, Yuchen Deng
Life of this patent
Estimating the term…
Abstract
Diffraction patterns of a sample at various tilt angles are acquired by irradiating a region of interest using a first charged particle beam. Sample images are acquired by irradiating the region of interest using a second charged particle beam. The first and second charged particle beams are formed by splitting charged particles generated by a charged particle source.
Claims20
A method for imaging a sample with charged particle beams, comprising:
- splitting charged particles generated from a charged particle source into a first charged particle beam and a second charged particle beam;
- acquiring a diffraction pattern by irradiating a region of interest (ROI) of the sample with the first charged particle beam;
- and
- acquiring a sample image by irradiating the ROI with a second charged particle beam.
1 more element
A method for imaging a sample with charged particle beams, comprising:
- acquiring a first diffraction pattern and a first sample image by simultaneously irradiating a region of interest (ROI) with a first charged particle beam and a second charged particle beam, wherein the first charged particle beam and the second charged particle beam are formed by splitting charged particles generated by a charged particle source.
A system for imaging a sample, comprising:
- an optical column including a charged particle source and a bifocal beamformer, wherein the bifocal beam former splits charged particles generated from the charged particle source into a first charged particle beam and a second charged particle beam;
- a sample positioned in a sample chamber coupled to the optical column;
- a detector positioned downstream of the sample;
- and
- a controller with computer readable instructions stored in a non-transitory memory, the controller is configured to:
- irradiate a region of interest (ROI) of the sample with the first charged particle beam and acquire a diffraction pattern with the detector;
- and
- irradiate the ROI with the second charged particle beam and acquire a sample image with the detector.
5 more elements
Dependencies are inferred from the claim text.