Method for producing organic-inorganic hybrid materials

A process for the preparation of organic-inorganic hybrid materials comprising the steps of:

• i) providing a polymeric substrate in a reaction chamber;
• ii) pulsing a first metal, semimetal or semiconductor precursor or an monofunctional or oligofunctional organic molecule into the reaction chamber and then purging the reaction chamber, wherein there is no exposure time between the pulsing and the purging;
• iii) pulsing a second metal, semimetal or semiconductor precursor into the reaction chamber, followed by an exposure time and then purging of the reaction chamber, wherein the exposure time between the pulsing and the purging is at least 5 seconds;
• and
• iv) pulsing a co-reactant into the reaction chamber optionally followed by an exposure time and then purging of the reaction chamber, wherein the co-reactant reacts with the first metal, semimetal or semiconductor precursor when no monofunctional or oligofunctional organic molecule is pulsed in step (ii) and/or with the second metal, semimetal or semiconductor precursor;
• v) if necessary, pulsing a co-reactant into the reaction chamber, optionally followed by an exposure time, and then purging of the reaction chamber, wherein the co-reactant reacts with the unreacted first or second metal, semimetal or semiconductor precursor;
• wherein the co-reactant of step (iv) is different from the co-reactant of step (v) and wherein the first metal, semimetal or semiconductor precursor is different from the second metal, semimetal or semiconductor precursor.