Time-of-flight mass spectrometer and time-of-flight mass spectrometry method
AssigneeKioxia Corporation
InventorJun ASAKAWA
Life of this patent
Estimating the term…
Abstract
A time-of-flight mass spectrometer includes a beam irradiation unit that generates an ionized particle by emitting an ion beam in a pulse form to a sample, a mass spectrometry unit that causes the ionized particle to fly, an MCP disposed in the mass spectrometry unit to measure a mass by amplifying the ionized particle, an MCP power source that applies a voltage to the MCP, and an MCP gain adjustment unit that adjusts a gain of the voltage. The MCP gain adjustment unit adjusts the gain of the voltage until a subsequent pulse is emitted after the beam irradiation unit emits a first pulse of the ion beam.
Claims18
A time-of-flight mass spectrometer comprising:
- an ion light source configured to generate an ionized particle by emitting an ion beam in a pulse form to a sample;
- a mass spectrometry chamber that causes the ionized particle to fly;
- a micro channel plate (MCP) ion measurer disposed in the mass spectrometry chamber to measure a mass by amplifying the flown ionized particle;
- an MCP reference voltage source configured to apply a voltage to the MCP ion measurer;
- and
- an MCP gain adjuster configured to adjust a gain of the voltage,
- wherein the MCP gain adjuster is configured to adjust the gain of the voltage until a subsequent pulse is emitted after the ion light source emits a first pulse of the ion beam.
A time-of-flight mass spectrometry method comprising:
- generating an ionized particle by emitting an ion beam in a pulse form to a sample;
- causing the ionized particle to fly into a mass spectrometry chamber;
- and
- measuring a mass of the ionized particle by retrieving the flown ionized particle into an MCP ion measurer to amplify the ionized particle,
- wherein a gain of a voltage applied to the MCP ion measurer is adjusted in accordance with a flight time of the ionized particle until a subsequent pulse is emitted after a first pulse of the ion beam is emitted.
Dependencies are inferred from the claim text.