# US 2021/0280830 A1 · Organic light emitting display device and method of manufacturing same

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- Number: US 2021/0280830 A1
- Document ID: US20210280830A1
- Status: Published application
- Kind: A1
- Application number: 15/930,327
- Filed: 2020-05-12
- Published: 2021-09-09
- Earliest claimed: 2020-03-04
- Assignees: DB HiTek Co., Ltd.
- Applicants: DB HiTek Co., Ltd.
- Inventors: Dong-Hoon PARK; Dae-Il KIM; Young-Jin KIM; Hye-Rim EUN
- Web page: https://patentgrep.com/patent/US20210280830A1

## CPC

- H10K 59/35: comprising red-green-blue [RGB] subpixels
- H10K 59/124: Insulating layers formed between TFT elements and OLED elements
- H10K 59/8051: {Anodes}
- H10K 59/873: {Encapsulations}
- H10K 59/876: {comprising a resonant cavity structure, e.g. Bragg reflector pair}
- H10K 59/878: {comprising reflective means}
- H10K 71/00: Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K 71/231: {by etching of existing layers}
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

An organic light emitting display device in which a sidewall of a reflective metal layer in a blue pixel region is covered with an inorganic film and in which the reflective metal layer is thus prevented from being damaged or rendered defective when performing subsequent processes, such as etching and cleaning, for forming an anode on the reflective metal layer.

## Claims

### Claim 1

An organic light emitting display device comprising:
an interlayer insulation film covering an upper metal layer on a lower insulation layer;
a first reflective metal layer in a red pixel region on the interlayer insulation film;
a first insulation layer on the first reflective metal layer and an exposed surface of the interlayer insulation film;
a second reflective metal layer in a green pixel region on the first insulation layer;
a second insulation layer on the second reflective metal layer and an exposed surface of the first insulation layer;
a third reflective metal layer in a blue pixel region on the second insulation layer; and
an inorganic protective film on a sidewall of the third reflective metal layer.

### Claim 2 (depends on 1)

The organic light emitting display device according to claim 1, wherein
the first insulation layer includes a first protrusion in the red pixel region protruding upward from the first reflective metal layer, and
the second insulation layer includes second protrusions protruding upward from the first protrusion and the second reflective metal layer, respectively.

### Claim 3 (depends on 2)

The organic light emitting display device according to claim 2, further comprising
an anode on the second protrusions and an upper surface of the third reflective metal layer.

### Claim 4 (depends on 1)

The organic light emitting display device according to claim 1, wherein
each of the first to third reflective metal layers includes a buffer electrode and a metal layer on the buffer electrode, and
the third reflective metal layer comprises aluminum.

### Claim 5 (depends on 1)

The organic light emitting display device, according to claim 1, wherein
the first to third reflective metal layers have different heights or distances from lower insulation layer.

### Claim 6

A method of manufacturing an organic light emitting display device, the method comprising:
depositing an interlayer insulation film on an upper metal layer in each pixel region, the upper metal layer being on a lower insulation film;
forming a first reflective metal layer on the interlayer insulation film in a red pixel region;
forming a first insulation layer on the first reflective metal layer and an exposed surface of the interlayer insulation film;
forming a second reflective metal layer on the first insulation layer in a green pixel region;
forming a second insulation layer on the second reflective metal layer and an exposed surface of the first insulation layer;
forming a third reflective metal layer on the second insulation layer in a blue pixel region; and
covering an exposed surface of the third reflective metal layer.

### Claim 7 (depends on 6)

The method according to claim 6, wherein
covering the third reflective metal layer comprises covering an upper surface of the third reflective metal layer with a protective layer that comprises a metal material.

### Claim 8 (depends on 7)

The method according to claim 7, further comprising:
forming an anode on the protective layer on the upper surface of the third reflective metal layer, wherein
the protective layer and the anode comprise a same material, and
the protective layer has a smaller thickness than the anode.

### Claim 9 (depends on 6)

The method according to claim 6, further comprising
covering a sidewall of the third reflective metal layer with a protective film.

### Claim 10 (depends on 9)

The method according to claim 9, wherein
covering the sidewall of the third reflective metal layer with the protective film comprises depositing an inorganic film layer on the third reflective metal layer and an exposed surface of the second insulation layer, and then removing part of the inorganic film layer by anisotropic etching.

### Claim 11

A method of manufacturing an organic light emitting display device, the method comprising:
depositing an insulation film on an upper metal layer in each pixel region, the upper metal layer being on a lower insulation film;
forming a first reflective metal layer in a red pixel region, a second reflective metal layer in a green pixel region, and a third reflective metal layer in a blue pixel region having different heights by forming interlayer insulation films;
covering an upper surface of the third reflective metal layer with a protective layer that is relatively higher than the first reflective metal layer and the second reflective metal layer;
depositing an inorganic film layer on an upper exposed surface of the interlayer insulation film, the third reflective metal layer, and the protective layer; and
forming a protective film on a sidewall of the third reflective metal layer by etching the inorganic film layer.

### Claim 12 (depends on 11)

The method according to claim 11, further comprising:
depositing a metal layer on the protective layer, the metal layer comprising a same material as the protective layer; and
forming an anode by patterning and etching the metal layer.

### Claim 13 (depends on 12)

The method according to claim 12, wherein
the protective layer has a smaller thickness than the anode.

### Claim 14 (depends on 12)

The method according to claim 12, wherein
forming the anode comprises etching and cleaning the metal layer.

### Claim 15

A method of manufacturing an organic light emitting display device, the method comprising;
depositing an interlayer insulation film on an upper metal layer in each pixel region, the upper metal layer being on a lower insulation film;
forming a first reflective metal layer on the interlayer insulation film in a red pixel region;
forming a first insulation layer on the first reflective metal layer and an exposed surface of the interlayer insulation film such that a first protrusion protrudes upward from the first reflective metal layer;
forming a second reflective metal layer on the first insulation layer in a green pixel region;
forming a second insulation layer on the second reflective metal layer and an exposed surface of the first insulation layer such that second protrusions protrude upward from the first protrusion and the first reflective metal layer;
forming a third reflective metal layer on the second insulation layer in a blue pixel region; and
covering an exposed surface of the third reflective metal layer.

### Claim 16 (depends on 15)

The method according to claim 15, wherein
the first protrusion is a predetermined horizontal distance away from the second reflective metal layer, and
adjacent ones of the second protrusions are a predetermined horizontal distance away from each other.

### Claim 17 (depends on 16)

The method according to claim 16, wherein covering the third reflective metal layer comprises:
forming a protective layer comprising a metal layer on an upper surface of the third reflective metal layer;
depositing an insulation layer on the second insulation film, the third reflective metal layer, and an exposed surface of the metal layer; and
forming a protective film on a sidewall of the third reflective metal layer by etching the insulation layer.

### Claim 18 (depends on 17)

The method according to claim 17, further comprising:
forming an anode having a same material as the protective layer on the protective layer after forming the protective film.