# US 2021/0280719 A1 · High mobility semiconductor channel based thin-film transistors and manufacturing methods

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- Number: US 2021/0280719 A1
- Document ID: US20210280719A1
- Status: Published application
- Kind: A1
- Application number: 17/318,166
- Filed: 2021-05-12
- Published: 2021-09-09
- Earliest claimed: 2019-06-04
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Jung Bae KIM; Dong Kil YIM; Soo Young CHOI
- Web page: https://patentgrep.com/patent/US20210280719A1

## CPC

- H10D 30/6755: {Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate}
- H10D 30/473: {having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT}
- H10D 30/6734: {having gate electrodes arranged on both top and bottom sides of the channel, e.g. dual-gate TFTs}
- H10D 62/80: characterised by the materials
- H10D 86/423: {comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO}
- H10D 86/60: wherein the TFTs are in active matrices
- H10D 86/427: {having different thicknesses of the semiconductor bodies in different TFTs}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

Embodiments herein include thin-film transistors (TFTs) including channel layer stacks with layers having differing mobilities. The TFTs disclosed herein transport higher total current through both the low mobility and the high mobility channel layers due to higher carrier density in high mobility channel layer and/or the high mobility channel layers, which increases the speed of response of the TFTs. The TFTs further include a gate structure disposed over the channel layer stack. The gate structure includes one or more gate electrodes, and thus the TFTs are top-gate (TG), double-gate (DG), or bottom-gate (BG) TFTs. The channel layer stack includes a plurality of layers with differing mobilities. The layers with differing mobilities confer various benefits to the TFT. The high mobility layer increases the speed of response of the TFT.

## Claims

### Claim 1

A device, comprising:
a substrate;
a thin film transistor (TFT) disposed over the substrate, the TFT comprising:
a metal oxide channel having a plurality of layers, wherein at least two of the plurality of layers comprises different electron mobility relative to one another;
one or more gate electrodes disposed over the substrate;
a buffer layer disposed below the metal oxide channel and in direct contact with a lowermost layer of the metal oxide channel, the lowermost layer having an electron mobility greater than at least one other layer of the metal oxide channel;
a source electrode contacting the metal oxide channel; and
a drain electrode contacting the metal oxide channel.

### Claim 2 (depends on 1)

The device of claim 1, wherein the metal oxide channel comprises three layers, each layer comprising different electron mobility.

### Claim 3 (depends on 1)

The device of claim 1, further comprising a gate insulating layer contacting a layer of the metal oxide channel having electron mobility lower than 20 cm2V·s.

### Claim 4 (depends on 1)

The device of claim 1, wherein each layer of the metal oxide channel is selected from the group consisting of In—Sn—O, In—Ga—O, In—Zn—O, In—Zn—Sn—O, In—Ga—Zn—O, In—Ga—Sn—O, In—Ga—Zn—Sn—O, and combinations thereof.

### Claim 5 (depends on 1)

The device of claim 1, wherein each layer of the metal oxide channel has a thickness from about 0.5 nm to about 50 nm.

### Claim 6 (depends on 1)

The device of claim 1, wherein the TFT has an electron mobility of about 35 cm2V·s to about 70 cm2/V s.

### Claim 7 (depends on 1)

The device of claim 1, wherein the one or more gate electrodes comprises a bottom gate electrode, wherein a width of the bottom gate electrode is greater than a width of the metal oxide channel.

### Claim 8 (depends on 1)

The device of claim 1, wherein the one or more gate electrodes comprises a top gate electrode.

### Claim 9 (depends on 1)

The device of claim 1, wherein the TFT has a threshold voltage of about −0.5 V to about 2.5 V.

### Claim 10

A device, comprising:
a substrate;
a thin film transistor (TFT) disposed over the substrate, the TFT comprising:
a channel having a plurality of layers, wherein at least two of the plurality of layers comprise different electron mobility relative to one another;
a bottom gate electrode disposed below the channel and comprising a bottom gate width equal to or less than a width of the channel;
a source electrode contacting the channel; and
a drain electrode contacting the channel.

### Claim 11 (depends on 10)

The device of claim 10, further comprising a top gate electrode disposed above the channel, wherein the top gate electrode comprises a top gate width less than or equal to the bottom gate width.

### Claim 12 (depends on 10)

The device of claim 10, wherein each layer of the channel is selected from the group consisting of In—Sn—O, In—Ga—O, In—Zn—O, In—Zn—Sn—O, In—Ga—Zn—O, In—Ga—Sn—O, In—Ga—Zn—Sn—O, and combinations thereof.

### Claim 13 (depends on 10)

The device of claim 10, wherein at least one of the plurality of layers of the channel has an electron mobility lower than 20 cm2/V·s.

### Claim 14 (depends on 10)

The device of claim 10, wherein the TFT has a threshold voltage of about −0.5 V to about 2.5 V.

### Claim 15 (depends on 10)

The device of claim 10, wherein the TFT has an electron mobility of about 35 cm2/V·s to about 70 cm2/V s.

### Claim 16 (depends on 10)

The device of claim 10, wherein at least one layer of the channel is free of Zn.

### Claim 17

A device, comprising:
a substrate;
a thin film transistor (TFT) disposed over the substrate, the TFT comprising:
a first metal oxide layer having a first electron mobility; and
a second metal oxide layer contacting the first metal oxide layer, wherein the second metal oxide layer comprises an electron mobility greater than the first metal oxide layer, wherein the second metal oxide layer is free of Sn, wherein the first and second metal oxide layers together form a channel;
one or more gate electrodes disposed over the substrate;
a source electrode contacting the channel; and
a drain electrode contacting the channel.

### Claim 18 (depends on 17)

The device of claim 17, wherein a width of a first bottom gate electrode of the one or more gate electrodes is greater than a width of the channel.

### Claim 19 (depends on 17)

The device of claim 17, wherein the first metal oxide layer of the channel is selected from the group consisting of In—Sn—O, In—Ga—O, In—Zn—O, In—Zn—Sn—O, In—Ga—Zn—O, In—Ga—Sn—O, In—Ga—Zn—Sn—O, and combinations thereof.

### Claim 20 (depends on 17)

The device of claim 17, wherein the second metal oxide layer is selected from the group consisting of In—Ga—O, In—Zn—O, In—Ga—Zn—O, and combinations thereof.