# US 2021/0280452 A1 · Creating an implanted layer in a silicon-on-insulator (soi) wafer through crystal orientation channeling

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- Number: US 2021/0280452 A1
- Document ID: US20210280452A1
- Status: Published application
- Kind: A1
- Application number: 16/809,796
- Filed: 2020-03-05
- Published: 2021-09-09
- Earliest claimed: 2020-03-05
- Assignees: QUALCOMM Incorporated
- Applicants: QUALCOMM Incorporated
- Inventors: Ravi Pramod Kumar VEDULA; Stephen Alan FANELLI
- Web page: https://patentgrep.com/patent/US20210280452A1

## CPC

- H10P 90/1908: {using silicon implanted buried insulating layers, e.g. oxide layers [SIMOX]}
- H10P 30/209: {in silicon to make buried insulating layers}
- H10W 10/181: {Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

Utilizing crystal orientation channeling through the semiconductor lattice structure of a silicon-on-insulator (SOI) wafer to create a thermally stable implanted amorphous layer beneath a buried oxide (BOX) layer in the SOI wafer is described. Utilizing channeling in this manner may involve tilting and/or twisting the SOI wafer to align axes of the crystal orientation channels with projections vectors from an implanter. One example method of fabricating a semiconductor device generally includes orienting an SOI substrate, the SOI substrate having a BOX layer and a device layer disposed above the BOX layer, such that directions of projection vectors from an implanter are substantially aligned with longitudinal axes of crystal orientation channels in a lattice structure of a semiconductor material of the device layer; and projecting, with the implanter, ions or particles into the crystal orientation channels of the oriented SOI substrate to create an implanted layer below the BOX layer.

## Claims

### Claim 1

A method of fabricating a semiconductor device, comprising:
orienting a silicon-on-insulator (SOI) substrate, the SOI substrate having a buried oxide (BOX) layer and a device layer disposed above the BOX layer, such that directions of projection vectors from an implanter are substantially aligned with longitudinal axes of crystal orientation channels in a lattice structure of a semiconductor material of the device layer; and
projecting, with the implanter, ions or particles into the crystal orientation channels in the lattice structure of the semiconductor material of the device layer of the oriented SOI substrate to create an implanted layer below the BOX layer in the SOI substrate.

### Claim 2 (depends on 1)

The method of claim 1, wherein the orienting comprises tilting a plane of the SOI substrate with respect to the directions of the projection vectors.

### Claim 3 (depends on 2)

The method of claim 2, wherein the orienting further comprises twisting the SOI substrate.

### Claim 4 (depends on 1)

The method of claim 1, wherein the orienting comprises aligning the directions of the projection vectors within ±1° of the longitudinal axes of the crystal orientation channels in the lattice structure.

### Claim 5 (depends on 1)

The method of claim 1, wherein the projecting comprises vertical implantation of the ions or particles, such that a plane of the SOI substrate has a tilt angle with respect to vertical projections of the ions or particles from the implanter.

### Claim 6 (depends on 1)

The method of claim 1, wherein the ions or particles comprise carbon (C) ions or boron (B) ions.

### Claim 7 (depends on 1)

The method of claim 1, wherein the ions or particles comprise oxygen (O), hydrogen (H), or nitrogen (N) particles.

### Claim 8 (depends on 1)

The method of claim 1, wherein the ions or particles comprise helium (He), argon (Ar), neon (Ne), xenon (Xe), or krypton (Kr) particles.

### Claim 9 (depends on 1)

The method of claim 1, wherein the BOX layer scatters the projected ions or particles to create the implanted layer.

### Claim 10 (depends on 1)

The method of claim 1, wherein the implanted layer becomes amorphous when a concentration of the projected ions or particles exceeds a critical dose.

### Claim 11 (depends on 1)

The method of claim 1, wherein the implanted layer comprises a thermally stable implanted amorphous layer.

### Claim 12 (depends on 1)

The method of claim 1, wherein no layer transfer or bonding is performed to create a trap rich SOI wafer.

### Claim 13 (depends on 1)

The method of claim 1, wherein the SOI substrate further comprises a high-resistivity silicon handle disposed beneath the BOX layer.

### Claim 14 (depends on 1)

The method of claim 1, wherein the implanted layer is generated at a depth between 10 Å and 4000 Å from a bottom surface of the BOX layer.

### Claim 15 (depends on 1)

The method of claim 1, wherein the projecting comprises projecting with an implantation energy of at least 30 keV and less than 200 keV.

### Claim 16 (depends on 1)

The method of claim 1, wherein the projecting comprises projecting the ions or particles with parallel beams.

### Claim 17

A method of fabricating a semiconductor device, comprising:
orienting an implanter such that projection vectors from the implanter will be substantially aligned with longitudinal axes of crystal orientation channels in a lattice structure of a semiconductor material of a device layer in a silicon-on-insulator (SOI) substrate; and
projecting, with the oriented implanter according to the projection vectors, ions or particles into the crystal orientation channels in the lattice structure of the semiconductor material of the device layer to create an implanted layer below a buried oxide (BOX) layer disposed below the device layer in the SOI substrate.

### Claim 18 (depends on 17)

The method of claim 17, wherein the orienting comprises aligning directions of the projection vectors within ±1° of the longitudinal axes of the crystal orientation channels in the lattice structure.

### Claim 19 (depends on 17)

The method of claim 17, wherein the projecting comprises vertical implantation of the ions or particles, such that the projection vectors from the implanter have a tilt angle with respect to an orthogonal projection from a plane of the SOI substrate.

### Claim 20 (depends on 17)

The method of claim 17, wherein the ions or particles comprise carbon (C) ions.