# US 2021/0280447 A1 · Substrate transfer system and atmospheric transfer module > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2021/0280447 A1 - Document ID: US20210280447A1 - Status: Published application - Kind: A1 - Application number: 17/187,299 - Filed: 2021-02-26 - Published: 2021-09-09 - Earliest claimed: 2020-03-03 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Norihiko AMIKURA; Toshiaki TOYOMAKI - Web page: https://patentgrep.com/patent/US20210280447A1 ## CPC - H10P 72/3402: {Mechanical parts of transfer devices} - B65G 47/90: Devices for picking-up and depositing articles or materials - B65G 47/902: {provided with drive systems incorporating rotary and rectilinear movements} - H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)} - H10P 72/0461: {characterised by the presence of two or more transfer chambers} - H10P 72/0464: {characterised by the construction of the transfer chamber} - H10P 72/53: {using optical controlling means} - H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance} - H10P 72/0441: {Apparatus for sealing, encapsulating, glassing, decapsulating or the like} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) ## Abstract A substrate transfer system includes a load lock module, an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module, and a substrate transfer robot disposed in the atmospheric transfer module. The substrate transfer robot includes a base configured to reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base. ## Claims ### Claim 1 A substrate transfer system comprising: a load lock module; an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module; and a substrate transfer robot disposed in the atmospheric transfer module, the substrate transfer robot including: a base configured to reciprocate along the first sidewall; a substrate transfer arm disposed on the base; and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base. ### Claim 2 (depends on 1) The substrate transfer system of claim 1, wherein the flow rectifier has an inclined side face, a bottom, and a top, the inclined side face flaring from the bottom to the top in a plan view, the obliquely downward air flow being thereby created. ### Claim 3 (depends on 2) The substrate transfer system of claim 2, wherein the inclined side face of the flow rectifier includes a first tapering portion and a second tapering portion opposite to the first tapering portion in the moving direction in a plan view. ### Claim 4 (depends on 1) The substrate transfer system of claim 1, wherein the flow rectifier is separable from the base. ### Claim 5 (depends on 1) The substrate transfer system of claim 1, wherein the flow rectifier is integrated with the base. ### Claim 6 (depends on 1) The substrate transfer system of claim 1, further comprising a guide rail fixed to the first sidewall in the atmospheric transfer module, wherein the base is movable along the guide rail. ### Claim 7 (depends on 1) The substrate transfer system of claim 1, further comprising a load port adjacent to the second sidewall, wherein the first sidewall and the second sidewall have a distance of 700 mm or less. ### Claim 8 (depends on 1) The substrate transfer system of claim 1, wherein the substrate transfer robot is movable at a rate of 800 mm/sec or more. ### Claim 9 (depends on 1) The substrate transfer system of claim 1, further comprising a substrate aligner module fixed to the first sidewall, the substrate aligner module being configured to correct a misalignment of a substrate. ### Claim 10 (depends on 1) The substrate transfer system of claim 1, further comprising an edge ring aligner module fixed to the first sidewall, the edge ring aligner module being configured to correct a misalignment of an edge ring, wherein the substrate transfer arm is configured to transfer the edge ring. ### Claim 11 (depends on 1) The substrate transfer system of claim 1, further comprising an aligner module fixed to the first sidewall, the aligner module being configured to correct a misalignment of a substrate and a misalignment of an edge ring, wherein the substrate transfer arm is configured to transfer the edge ring. ### Claim 12 (depends on 11) The substrate transfer system of claim 11, wherein the aligner module includes: an ER support configured to support the edge ring; an ER rotor configured to receive the edge ring from the ER support and to rotate the edge ring; a determiner configured to determine a reference shape of the edge ring; and a substrate rotor configured to rotate the substrate, wherein the determiner is configured to determine a reference shape of the substrate while the substrate is being rotated by the substrate rotor. ### Claim 13 (depends on 1) The substrate transfer system of claim 1, wherein the substrate transfer arm comprises: an end effector including a substrate support and an edge ring support. ### Claim 14 An atmospheric transfer module having a first wall and being connectable to a load lock module, comprising: a transfer robot therein to transfer a substrate; the transfer robot comprising: a base capable of reciprocating along the first wall; an arm disposed on the base for transfer of the substrate; and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base.