# US 2021/0280446 A1 · Manifold for a substrate container > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2021/0280446 A1 - Document ID: US20210280446A1 - Status: Published application - Kind: A1 - Application number: 17/192,715 - Filed: 2021-03-04 - Published: 2021-09-09 - Earliest claimed: 2020-03-06 - Assignees: Entegris, Inc. - Applicants: Entegris, Inc. - Inventors: Matthew FULLER; Colton J. HARR; Ian DUTRO - Web page: https://patentgrep.com/patent/US20210280446A1 ## CPC - H10P 72/1918: {characterised by coupling elements, kinematic members, handles or elements to be externally gripped} - H10P 72/1924: {characterised by atmosphere control} - H10P 72/1922: {characterised by the construction of the closed carrier} - H10P 72/1926: {characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A substrate container includes a shell defining an interior space and a manifold with an inlet and a gas distributing surface. The shell includes a front opening, a bottom wall, and a rear wall. The manifold is attached to the bottom wall and is closer to the front opening than the rear wall. The gas distributing surface is configured to distribute purge gas into the interior space. A method of purging an open substrate container includes supplying a first stream of purge gas to a manifold and supplying a second stream of purge gas to an interior space of the substrate container. The method also including the manifold distributing the purge gas of the first stream within the interior space of the substrate container. ## Claims ### Claim 1 A substrate container, comprising: a shell defining an interior space, the shell including a front opening, a first side wall, a second side wall, a rear wall, a bottom wall, and a front edge extending between opposing walls along the front opening of the shell; and a manifold attached the bottom wall, the top wall, the first sidewall and/or the second side wall closer to the front opening of the shell than the rear wall, the manifold including: an inlet configured to receive a stream of purge gas; and a gas distributing portion including a gas distributing surface configured to distribute the stream of purge gas into the interior space, the gas distributing portion including the gas distributing surface extending in a direction between opposing walls along a front edge of the shell. ### Claim 2 (depends on 1) The substrate container of claim 1, wherein the inlet of the manifold is attached to an inlet port in the bottom wall of the shell. ### Claim 3 (depends on 1) The substrate container of claim 1, wherein the gas distributing portion has a length that extends along a majority of a distance between the first side wall and the second side wall. ### Claim 4 (depends on 1) The substrate container of claim 1, wherein the gas distributing surface is configured to distribute at least a portion of the purge gas in a direction towards the front opening of the shell. ### Claim 5 (depends on 1) The substrate container of claim 1, wherein the gas distributing surface comprises a porous material. ### Claim 6 (depends on 1) The substrate container of claim 1, wherein the gas distributing surface includes a plurality of openings arranged along a length of the gas distributing surface between the first side wall and the second side wall. ### Claim 7 (depends on 1) The substrate container of claim 1, wherein the manifold includes an outlet configured to facilitate exhaustion of the purge gas from the interior space of the substrate container. ### Claim 8 (depends on 1) The substrate container of claim 1, wherein each of the bottom wall, top wall, first side wall or second side wall has an interior surface that faces the interior space, and the manifold is configured to distribute the purge gas from the gas distributing surface at an angle relative to the interior surface of respective bottom wall, top wall, first side wall or second side wall to which it is attached. ### Claim 9 (depends on 1) The substrate container of claim 1, wherein the manifold includes at least a first gas distributing portion having a gas distributing surface that extends along the front edge of the first side wall and a second gas distributing portion having a gas distributing surface that extends along one of a front edge of the second side wall of the shell, wherein the first side wall is opposite the second side wall of the shell. ### Claim 10 (depends on 1) The substrate container of claim 1, wherein the manifold includes a frame that supports the gas distributing portion including the gas distributing surface. ### Claim 11 (depends on 1) The substrate container of claim 1, further comprising: an outlet port for discharging gas from the interior space, wherein the gas distributing portion extends between the inlet and the outlet port. ### Claim 12 (depends on 11) The substrate container of claim 11, wherein the manifold includes an additional inlet attached to the outlet port. ### Claim 13 (depends on 12) The substate container of claim 12, wherein the gas distributing portion including the gas distributing surface is configured to allow purge gas under positive pressure in the interior space of the container to diffuse through the gas distributing surface and to be exhausted from the container via the outlet port. ### Claim 14 (depends on 1) The substrate container of claim 1, wherein the manifold further comprises a gas diffusion portion connected to an outlet port for discharging gas from the interior space. ### Claim 15 (depends on 1) The substrate container of claim 1, further comprising an additional manifold attached to the top wall of the container. ### Claim 16 (depends on 1) The substrate container of claim 1, wherein the shell includes a rear wall opposite to the front opening, and the bottom wall includes a rear inlet port for introducing an additional stream of purge gas into the interior space, the rear inlet port being disposed near the rear wall than the front opening. ### Claim 17 (depends on 1) The substrate container of claim 1, further comprising: a door configured to be received within the front opening defined by the shell to enclose the interior space. ### Claim 18 A substrate container, comprising: a shell defining an interior space, the shell including a front opening, a first side wall, a second side wall, a rear wall, a top wall, a bottom wall and including a front edge extending between opposing walls along the front opening of the shell, and a port in the bottom wall and/or the top wall of the shell; and a manifold attached to the shell near the front opening, the manifold including: a gas diffusion portion including a gas diffusion surface configured to permit the diffusion of the stream of purge gas from the interior space into the manifold, the gas diffusion portion including the gas diffusion surface extending in a direction between the first side wall and the second side wall of the shell; and an outlet coupled to the at least one port in the shell, the outlet configured to exhaust the purge gas from the manifold the port in the shell to an exterior of the substrate container. ### Claim 19 (depends on 18) The substrate container of claim 18, wherein the manifold is attached to the port in the bottom wall or the top wall of the shell. ### Claim 20 A method of purging a substrate container when having a front opening that is open, comprising: supplying, via a front inlet port disposed in a wall of the substrate container, a first stream of purge gas to an inlet of a manifold disposed within the substrate container, the manifold being disposed closer to the front opening than a rear wall of the substrate container; distributing, via the manifold, the purge gas of the first stream within an interior space of the substrate container; and supplying, via a second inlet port in a wall of the substrate container, a second stream of purge gas to the to the interior space of the substrate container, the second inlet port being disposed closer to the rear wall of the substrate container than the front opening of the substrate container.