# US 2021/0280259 A1 · Memory device and method of operating the memory device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2021/0280259 A1 - Document ID: US20210280259A1 - Status: Published application - Kind: A1 - Application number: 16/996,213 - Filed: 2020-08-18 - Published: 2021-09-09 - Earliest claimed: 2020-03-03 - Assignees: SK hynix Inc. - Applicants: SK hynix Inc. - Inventors: Hyun Chul CHO - Web page: https://patentgrep.com/patent/US20210280259A1 ## CPC - G11C 16/30: Power supply circuits - G11C 5/025: {Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device (geometrical lay-out of the components in integrated circuits, geometrical lay-out of the components in integrated circuits H10D89/10)} - G11C 5/145: {Applications of charge pumps; Boosted voltage circuits; Clamp circuits therefor (G11C5/141 takes precedence)} - G11C 7/1042: {using interleaving techniques, i.e. read-write of one part of the memory while preparing another part} - G11C 7/1045: {Read-write mode select circuits} - G11C 16/08: Address circuits; Decoders; Word-line control circuits - G11C 16/32: Timing circuits - G11C: STATIC STORES (semiconductor memory devices H10B) ## Abstract A memory device may include: a memory cell array including a plurality of planes; and a voltage generation circuit including a master pump component and at least one or more sub-pump components that respectively correspond to the planes. During an interleaved operation, the master pump component may generate a first output voltage in response to a first pump clock, and the sub-pump components may generate second output voltages in response to second pump clocks. The master pump component and the sub-pump components may respectively provide the first output voltage and the second output voltages to the corresponding planes. During a non-interleaved operation, the master pump component and the sub-pump components may generate the first output voltage in response to the first pump clock and provide the first output voltage to a selected plane of the plurality of planes. ## Claims ### Claim 1 A memory device comprising: a memory cell array comprising a plurality of planes; and a voltage generation circuit comprising a master pump component and at least one or more sub-pump components that respectively correspond to the plurality of planes, wherein, during an interleaved operation, the master pump component generates a first output voltage in response to a first pump clock, and the at least one or more sub-pump components generate second output voltages in response to second pump clocks, and the master pump component and the at least one or more sub-pump components respectively provide the first output voltage and the second output voltages to the corresponding planes, and wherein, during a non-interleaved operation, the master pump component and the at least one or more sub-pump components generate the first output voltage in response to the first pump clock and provide the first output voltage to a selected plane of the plurality of planes. ### Claim 2 (depends on 1) The memory device according to claim 1, further comprising a word line decoder circuit coupled between the voltage generation circuit and the memory cell array, wherein the word line decoder circuit comprises a plurality of decoders respectively corresponding to the plurality of planes. ### Claim 3 (depends on 2) The memory device according to claim 2, wherein the voltage generation circuit comprises: a pump circuit comprising the master pump component and the at least one or more sub-pump components; a bias switch configured to electrically connect an output terminal of the master pump component with output terminals of the at least one or more sub-pump components during the non-interleaved operation; and a word line switch circuit configured to receive the first output voltage and the second output voltages from the master pump component and the at least one or more sub-pump components and transmit the first output voltage and the second output voltages to the word line decoder circuit. ### Claim 4 (depends on 3) The memory device according to claim 3, wherein the bias switch electrically disconnects the output terminal of the master pump component from the output terminals of the at least one or more sub-pump components during the interleaved operation. ### Claim 5 (depends on 3) The memory device according to claim 3, wherein the word line switch circuit comprises a plurality of word line switches respectively corresponding to the plurality of planes, and wherein, during the interleaved operation, each of the plurality of word line switches receives one of the first output voltage and the second output voltages that are generated from the master pump component and the at least one or more sub-pump components, and transmits the received output voltage to a corresponding decoder of the plurality of decoders. ### Claim 6 (depends on 3) The memory device according to claim 3, wherein the master pump component comprises: a first stage configured to generate the first output voltage in response to the first pump clock; and a first amplifier configured to receive the first output voltage as a first feedback voltage and generate the first pump clock in response to the received first feedback voltage. ### Claim 7 (depends on 6) The memory device according to claim 6, wherein each of the at least one or more sub-pump components comprises: a second stage configured to generate one of the second output voltages in response to one of the second pump clocks during the interleaved operation; a second amplifier configured to receive one of the second output voltages as a second feedback voltage and generate one of the second pump clocks in response to the received second feedback voltage; and a first switch configured to provide one of the second pump clocks to the second stage during the interleaved operation. ### Claim 8 (depends on 7) The memory device according to claim 7, wherein each of the at least one or more sub-pump components further comprises a second switch configured to provide the first pump clock generated from the master pump component to the second stage during the non-interleaved operation. ### Claim 9 A memory device comprising: a memory cell array comprising a plurality of planes; and a voltage generation circuit comprising a master pump component and at least one or more sub-pump components that respectively correspond to the plurality of planes, wherein the voltage generation circuit provides, during an interleaved operation, a plurality of output voltages that are respectively generated from the master pump component and the at least one or more sub-pump components respectively to the plurality of planes, and provides, during a non-interleaved operation, an output voltage generated from the master pump component to a selected plane of the plurality of planes. ### Claim 10 (depends on 9) The memory device according to claim 9, further comprising a word line decoder circuit coupled between the voltage generation circuit and the memory cell array, wherein the word line decoder circuit comprises a plurality of decoders respectively corresponding to the plurality of planes. ### Claim 11 (depends on 10) The memory device according to claim 10, wherein the voltage generation circuit comprises: a pump circuit comprising the master pump component and the at least one or more sub-pump components; a bias switch configured to electrically connect an output terminal of the master pump component with output terminals of the at least one or more sub-pump components during the non-interleaved operation; and a word line switch circuit configured to receive the plurality of output voltages from the master pump component and the at least one or more sub-pump components and transmit the output voltages to the word line decoder circuit. ### Claim 12 (depends on 11) The memory device according to claim 11, wherein the bias switch electrically disconnects the output terminal of the master pump component from the output terminals of the at least one or more sub-pump components during the interleaved operation. ### Claim 13 (depends on 11) The memory device according to claim 11, wherein the word line switch circuit comprises a plurality of word line switches respectively corresponding to the plurality of planes, and wherein, during the interleaved operation, each of the plurality of word line switches receives one of the plurality of output voltages that are generated from the master pump component and the at least one or more sub-pump components, and transmits the received output voltage to a corresponding decoder of the plurality of decoders. ### Claim 14 (depends on 11) The memory device according to claim 11, wherein the master pump component comprises: a first stage configured to generate a first output voltage of the plurality of output voltages in response to the first pump clock; and a first amplifier configured to receive the first output voltage as a first feedback voltage and generate the first pump clock in response to the received first feedback voltage. ### Claim 15 (depends on 14) The memory device according to claim 14, wherein each of the at least one or more sub-pump components comprises: a second stage configured to generate a second output voltage of the plurality of output voltages in response to the second pump clock during the interleaved operation; and a second amplifier configured to receive the second output voltage as a second feedback voltage and generate the second pump clock in response to the received second feedback voltage; and a first switch configured to provide the second pump clock to the second stage during the interleaved operation. ### Claim 16 (depends on 15) The memory device according to claim 15, wherein each of the at least one or more sub-pump components further comprises a second switch configured to provide the first pump clock generated from the master pump component to the second stage during the non-interleaved operation. ### Claim 17 (depends on 16) The memory device according to claim 16, wherein the second stage is operated in response to the first pump dock during the non-interleaved operation and generates the second output voltage having a level equal to a level of the first output voltage. ### Claim 18 (depends on 16) The memory device according to claim 16, wherein the second amplifier is disabled during the non-interleaved operation. ### Claim 19 A memory device comprising: a memory cell array comprising a first plane and a second plane; and a voltage generation circuit comprising a master pump component corresponding to the first plane and a sub-pump component corresponding to the second plane, and configured to provide, during an interleaved operation, a first output voltage generated from the master pump component to the first plane and provide a second output voltage generated from the sub-pump component to the second plane, and selectively provide, during a non-interleaved operation, the first output voltage generated from the master pump circuit to one of the first plane and the second plane. ### Claim 20 (depends on 19) The memory device according to claim 19, wherein the sub-pump component generates, during the non-interleaved operation, the second output voltage having a level equal to a level of the first output voltage. ### Claim 21 (depends on 19) The memory device according to claim 19, wherein the master pump component comprises: a first stage configured to generate a first output voltage of the plurality of output voltages in response to the first pump clock; and a first amplifier configured to receive the first output voltage as a first feedback voltage and generate the first pump clock in response to the received first feedback voltage. ### Claim 22 (depends on 21) The memory device according to claim 21, wherein the sub-pump component comprises: a second stage configured to generate a second output voltage of the plurality of output voltages in response to the second pump clock during the interleaved operation; a second amplifier configured to receive the second output voltage as a second feedback voltage and generate the second pump clock in response to the received second feedback voltage; and a first switch configured to provide the second pump clock to the second stage during the interleaved operation. ### Claim 23 (depends on 22) The memory device according to claim 22, wherein the sub-pump component further comprises a second switch configured to provide the first pump dock generated from the master pump component to the second stage during the non-interleaved operation. ### Claim 24 (depends on 22) The memory device according to claim 22, wherein the second amplifier is disabled during the non-interleaved operation. ### Claim 25 (depends on 19) The memory device according to claim 19, wherein the voltage generation circuit further comprises a bias switch configured to electrically connect, during the non-interleaved operation, an output terminal of the master pump component with an output terminal of the sub-pump component, and electrically disconnect, during the interleaved operation, the output terminal of the master pump component from the output terminal of the sub-pump component. ### Claim 26 A method of operating a memory device, the memory device including a interleaved operation and a non-interleaved operation in response to a command received, wherein the interleaved operation comprises: generating, a first output voltage and a second output voltage by activating a master pump component and a sub-pump component that respectively correspond to a first plane and a second plane; and performing overall operations of the first plane and the second plane in an interleaved manner by providing the first output voltage to the first plane and providing the second output voltage to the second plane; wherein the non-interleaved operation comprises: generating, the first output voltage by activating the master pump component; and performing an overall operation of a selected plane of the first plane and the second plane in a non-interleaved manner by providing the first output voltage to the selected plane. ### Claim 27 (depends on 26) The method according to claim 26, further comprising electrically connecting an output terminal of the master pump component with an output terminal of the sub-pump component during the non-interleaved operation. ### Claim 28 (depends on 27) The method according to claim 27, wherein, during the non-interleaved operation, an amplifier included in the sub-pump component is disabled, and the sub-pump component generates the second output voltage having a level equal to a level of the first output voltage in response to a pumping clock generated from the master pump component.