# US 2021/0278533 A1 · Optical device for determining a distance of a measurement object

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- Number: US 2021/0278533 A1
- Document ID: US20210278533A1
- Status: Published application
- Kind: A1
- Application number: 17/196,984
- Filed: 2021-03-09
- Published: 2021-09-09
- Earliest claimed: 2020-03-09
- Assignees: Carl Zeiss Industrielle Messtechnik GmbH
- Applicants: Carl Zeiss Industrielle Messtechnik GmbH
- Inventors: Nils Haverkamp
- Web page: https://patentgrep.com/patent/US20210278533A1

## CPC

- G01S 7/497: Means for monitoring or calibrating
- G01S 17/08: for measuring distance only (indirect measurement G01S17/46; active triangulation systems G01S17/48)
- G01S 7/4815: {using multiple transmitters}
- G01S 7/484: Transmitters
- G01S 7/486: Receivers
- G01S 7/4911: Transmitters
- G01S 17/34: using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
- G01S 17/66: Tracking systems using electromagnetic waves other than radio waves
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES

## Abstract

An optical device for determining a distance of a measurement object includes a LIDAR unit and a light sensor. The LIDAR unit has an illumination device to illuminate the measurement object and a measurement channel to detect a measurement beam reflected from the measurement object and to generate a LIDAR measurement signal. The light sensor has an optical source with a mode-locked laser to generate first and second frequency comb signals and splits the first frequency comb signal into a first measurement signal and a first reference signal and to illuminate the measurement object with the first measurement signal. The light sensor splits the second frequency comb signal into a second measurement signal and a second reference signal. An evaluation unit determines first distance information, evaluates signals detected by a measurement detector and a reference detector, generates a frequency spectrum, and determines second distance information of the measurement object.

## Claims

### Claim 1

An optical device for determining a distance of a measurement object, the optical device comprising:
at least one LIDAR unit, having at least one illumination device configured to generate at least one frequency-modulated input light beam and to illuminate the measurement object with the at least one frequency-modulated input light beam, wherein the at least one LIDAR unit has at least one measurement channel configured to detect at least one measurement beam reflected from the measurement object in response to the at least one frequency-modulated input light beam and to generate at least one LIDAR measurement signal;
at least one light sensor having at least one optical source with at least one mode-locked laser, wherein the at least one mode-locked laser is configured to generate at least one first frequency comb signal and at least one second frequency comb signal, wherein the at least one light sensor is configured to split the at least one first frequency comb signal into at least one first measurement signal and at least one first reference signal and to illuminate the measurement object with the at least one first measurement signal, wherein the at least one light sensor is configured to split the at least one second frequency comb signal into at least one second measurement signal and at least one second reference signal, wherein the at least one light sensor has at least one measurement detector and at least one reference detector, wherein the at least one measurement detector is configured to detect the at least one first measurement signal reflected from the measurement object and the at least one second measurement signal, wherein the at least one reference detector is configured to detect the at least one first reference signal and the at least one second reference signal; and
at least one evaluation unit configured to determine at least one item of first distance information of the measurement object from the at least one LIDAR measurement signal, wherein the at least one evaluation unit is configured to evaluate signals respectively detected by the at least one measurement detector and the at least one reference detector and to generate at least one frequency spectrum of the respective signals, wherein the at least one evaluation unit is configured to determine at least one item of second distance information of the measurement object from a comparison of the at least one frequency spectrum detected by the at least one measurement detector and the at least one frequency spectrum detected by the at least one reference detector.

### Claim 2 (depends on 1)

The optical device according to claim 1, wherein the optical device is configured such that the first distance information and the second distance information are determined simultaneously.

### Claim 3 (depends on 1)

The optical device according to claim 1, wherein the at least one evaluation unit is configured to determine an item of combined distance information from the first distance information and the second distance information.

### Claim 4 (depends on 1)

The optical device according to claim 1, wherein a coarse distance is determined based on the first distance information, and
wherein a fine determination of the distance is performed based on the second distance information.

### Claim 5 (depends on 1)

The optical device according to claim 1, wherein the at least one optical source has at least one dual frequency comb source.

### Claim 6 (depends on 1)

The optical device according to claim 1, wherein the at least one LIDAR unit is configured to superpose a reference light beam on at least the detected reflected measurement beam and to determine a frequency spectrum of an arising beat signal, and
wherein the at least one LIDAR unit is configured to determine at least one peak in the frequency spectrum and to determine the first distance information of the measurement object therefrom.

### Claim 7 (depends on 1)

The optical device according to claim 1, wherein the at least one LIDAR unit and/or the at least one light sensor are/is implemented on at least one photonic integrated circuit.

### Claim 8 (depends on 1)

A method for determining the distance of the measurement object with at least one optical device according to claim 1, the method comprising:
determining at least one item of first distance information of the measurement object with the at least one LIDAR unit, having the at least one illumination device, wherein the at least one frequency-modulated input light beam is generated by the at least one illumination device and the measurement object is illuminated with the at least one frequency-modulated input light beam, wherein the at least one LIDAR unit has the at least one measurement channel, wherein the at least one measurement beam reflected from the measurement object in response to the at least one frequency-modulated input light beam is detected by the at least one measurement channel and the at least one LIDAR measurement signal is generated, wherein the first distance information of the measurement object is determined from the at least one LIDAR measurement signal by the at least one evaluation unit; and
determining the at least one item of second distance information of the measurement object with the at least one light sensor having the at least one optical source with the at least one mode-locked laser, wherein the at least one first frequency comb signal and the at least one second frequency comb signal are generated by the at least one mode-locked laser, wherein the at least one first frequency comb signal is split into the at least one first measurement signal and the at least one first reference signal and the measurement object is illuminated with the at least one first measurement signal, wherein the at least one second frequency comb signal is split into the at least one second measurement signal and the at least one second reference signal, wherein the at least one light sensor has the at least one measurement detector and the at least one reference detector, wherein the at least one first measurement signal reflected from the measurement object and the at least one second measurement signal are detected by the at least one measurement detector, wherein the at least one first reference signal and the at least one second reference signal are detected by the at least one reference detector, wherein the signals respectively detected by the at least one measurement detector and the at least one reference detector are evaluated by the at least one evaluation unit and the at least one frequency spectrum of the respective signals is generated, wherein the at least one item of second distance information of the measurement object is determined from the comparison of the at least one frequency spectrum detected by the at least one measurement detector and the at least one frequency spectrum detected by the at least one reference detector.

### Claim 9 (depends on 8)

A computer program which, when executed on a computer or computer network, carries out the method according to claim 8.

### Claim 10 (depends on 8)

A non-transitory computer-readable storage medium encoded with a computer program product comprising a program code that when executed on a computer or computer network causes the computer or computer network to carry out the method according to claim 8.
