Metal member
AssigneesA. C. Company, Tohoku University
InventorsAkira YOSHIKAWA, Rikito MURAKAMI, Yui YOKOTA, Takayuki NIHEI, Kei KAMADA, Yasuhiro SHOJI, Shunsuke KUROSAWA, Akihiro YAMAJI, Yuji OHASHI
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Abstract
A metal member according to this invention is composed of polycrystals of a metal made of ruthenium or an alloy containing ruthenium at a maximum ratio. The aspect ratio of a crystal grain of the polycrystalline metal member is 1.5 or more. A plurality of crystal grains forming the metal member are arranged with their major axes being pointed in the same direction, and the number of crystal grains in a section in the major axis direction of the crystal grains is 120 or less per 1 mm2.
Claims10
A metal member comprising polycrystals of a metal made of Ru or an alloy containing Ru at a maximum ratio, wherein
- an aspect ratio of a crystal grain is not less than 1.5, a plurality of crystal grains are arranged with major axes thereof being pointed in the same direction, and
- the number of crystal grains in a section in the direction of the major axes of the crystal grains is not more than 120 per 1 mm2.
A metal member comprising a metal made of an alloy containing Ru at a maximum ratio, a composition of the alloy being represented by RuαM1βM2γM3δM4ε, wherein
- M1 is one of Rh, Pd, Os, and Pt,
- M2 is one of Ta, W, Mo, Nb, and Re,
- M3 is one of Cr, Mn, Fe, Co, Ni, and V,
- M4 is one of Ti, Zr, Hf, Al, and Sc, and
- 0.5≤α≤1, 0≤β≤0.5, 0≤γ≤0.5, 0≤δ≤0.5, 0≤ε≤0.1, and 0≤β+γ+δ+ε≤0.5.
Dependencies are inferred from the claim text.