# US 2021/0277293 A1 · Carrier film for semi-conductor wafer processing

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- Number: US 2021/0277293 A1
- Document ID: US20210277293A1
- Status: Published application
- Kind: A1
- Application number: 17/192,319
- Filed: 2021-03-04
- Published: 2021-09-09
- Earliest claimed: 2020-03-06
- Assignees: Tredegar Surface Protection, LLC
- Applicants: Tredegar Surface Protection, LLC
- Inventors: Surya SSUBRAMANIAM; Carl Douglas RAY; Kevin A. BRADY
- Web page: https://patentgrep.com/patent/US20210277293A1

## CPC

- C09J 153/02: Vinyl aromatic monomers and conjugated dienes
- C09J 153/025: {modified}
- C09J 7/201: {characterised by the release coating composition on the carrier layer}
- C09J 7/243: {Ethylene or propylene polymers}
- C09J 7/387: {Block-copolymers}
- H10P 72/7402: {Wafer tapes, e.g. grinding or dicing support tapes}
- C09J 2423/045: in the release coating
- C09J 2423/046: in the substrate
- H10P 72/742: {involving stretching of the auxiliary support post dicing}
- C09J: ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES (preparation of glue or gelatine C09H)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A carrier film includes an adhesive layer, a core layer, and a release layer. The adhesive layer includes a hydrogenated styrene block copolymer having a storage modulus (G′) of less than or equal to 400 kPa at 25° C., and a first polyolefin elastomer. The core layer includes a second polyolefin elastomer, and the release layer includes a polyolefin.

## Claims

### Claim 1

A carrier film, comprising:
an adhesive layer comprising a hydrogenated styrene block copolymer having a storage modulus (G′) of less than or equal to 400 kPa at 25° C., and a first polyolefin elastomer;
a core layer comprising a second polyolefin elastomer; and
a release layer comprising a polyolefin.

### Claim 2 (depends on 1)

The carrier film according to claim 1, wherein the hydrogenated styrene block copolymer having a storage modulus (G′) of less than or equal to 300 kPa at 25° C.

### Claim 3 (depends on 1)

The carrier film according to claim 1, wherein the hydrogenated styrene block copolymer has a melt flow rate (MFR) of greater than 200 g/10 minutes at 230° C. under a 2.16 kg mass.

### Claim 4 (depends on 1)

The carrier film according to claim 1, wherein the hydrogenated styrene block copolymer has a styrene content of at least 20%.

### Claim 5 (depends on 1)

The carrier film according to claim 1, wherein the first polyolefin elastomer and the second polyolefin elastomer are the same material.

### Claim 6 (depends on 5)

The carrier film according to claim 5, wherein the first polyolefin elastomer and the second polyolefin elastomer are ethylene-octene copolymers.

### Claim 7 (depends on 1)

The carrier film according to claim 1, wherein the first polyolefin elastomer is an alpha-olefin copolymer.

### Claim 8 (depends on 7)

The carrier film according to claim 7, wherein the second polyolefin elastomer is an ethylene-octene copolymer.

### Claim 9 (depends on 1)

The carrier film according to claim 1, wherein the core layer further comprises a third polyolefin elastomer.

### Claim 10 (depends on 9)

The carrier film according to claim 9, wherein the second polyolefin elastomer and the third polyolefin elastomer have different melt flow rates (MFRs).

### Claim 11 (depends on 10)

The carrier film according to claim 10, wherein the core layer further comprises low density polyethylene.

### Claim 12 (depends on 1)

The carrier film according to claim 1, wherein the polyolefin in the release layer is low density polyethylene.

### Claim 13 (depends on 12)

The carrier film according to claim 12, wherein the release layer further comprises high density polyethylene.

### Claim 14 (depends on 1)

The carrier film according to claim 1, wherein the carrier film has a machine direction maximum elongation of greater than or equal to 590%.

### Claim 15 (depends on 1)

The carrier film according to claim 1, wherein the carrier film has a machine direction tensile strength of greater than or equal to 25 MPa.