Control Method of Grinding Water Flow Rate During Double Side Grinding Process
AssigneeXuzhou Xinjing Semiconductor Technology Co., Ltd
InventorsChien-Ming CHEN, Kin Peng LOW
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Abstract
The present disclosure discloses a control method of a grinding water flow rate during a double side grinding process. A double side grinder used includes a grinding wheel, a feed unit and a water supply device, wherein a water inlet is disposed on the feed unit. The control method includes: S001: according to the operation procedure of a double side grinder, prepare for grinding and complete the installation and debugging of workpiece; S002: in the process of double side grinding, the flow rate of the water inlet is set to decrease with the shortening of the teeth length of the grinding wheel, and the flow rate of the water inlet is set to have a linear relationship with the teeth length of the grinding wheel.
Claims10
A control method of a grinding water flow rate during a double side grinding process, wherein a double side grinder used comprises a grinding wheel, a feed unit and a water supply device, a water inlet being provided on the feed unit, the control method comprising:
- S001:
- according to a operation procedure of a double side grinder, preparing for grinding and completing the installation and debugging of a workpiece;
- S002:
- in the process of double side grinding, a flow rate of a water inlet being set to decrease with a shortening of a teeth length of the grinding wheel, and the flow rate of the water inlet being set to have a linear relationship with the teeth length of the grinding wheel.
Dependencies are inferred from the claim text.