# US 2021/0274926 A1 · Brush, method of forming a brush, and structure embodied in a machine readable medium used in a design process > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2021/0274926 A1 - Document ID: US20210274926A1 - Status: Published application - Kind: A1 - Application number: 16/811,935 - Filed: 2020-03-06 - Published: 2021-09-09 - Earliest claimed: 2020-03-06 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Rajeev BAJAJ - Web page: https://patentgrep.com/patent/US20210274926A1 ## CPC - A46D 3/00: Preparing, {i.e. Manufacturing} brush bodies - A46B 1/00: Brush bodies and bristles moulded as a unit - A46B 11/0006: {specially adapted to feed the bristle upper surface} - A46B 13/001: {Cylindrical or annular brush bodies} - B24B 37/34: Accessories - B29C 64/112: using individual droplets, e.g. from jetting heads - B29C 64/124: using layers of liquid which are selectively solidified - B33Y 10/00: Processes of additive manufacturing - B33Y 80/00: Products made by additive manufacturing - A46B 2200/3086: Brushes for polishing - B29L 2031/42: Brushes - H10P 72/0412: {using mainly scrubbing means, e.g. brushes} - A46D: MANUFACTURE OF BRUSHES - A46B: BRUSHES (handles not integral with brushware B25G) - B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS - B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00) - B33Y: ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING - B29L: INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Embodiments described herein generally relate to a brush, a method of forming a brush, and a structure embodied in a machine readable medium used in a design process are provided. The brush includes a body and a channel configured to deliver a cleaning liquid through holes in the body. The method forms the brush using 3D printing. The structure provides details for making the brush. The disclosure herein allows a method of forming a brush that does not require the removal of active porogen. ## Claims ### Claim 1 A brush, comprising: a body comprising a first polymer material comprising a plurality of body holes, the plurality of body holes having a first body region, wherein a first body porosity of the first body region is greater than about 70%; and a channel disposed in the body, the channel fluidly coupled to the plurality of body holes. ### Claim 2 (depends on 1) The brush of claim 1, wherein the plurality of body holes has a second body region, and a second body porosity of the second body region is greater than the first body porosity. ### Claim 3 (depends on 2) The brush of claim 2, wherein the first polymer material has a third body region, a third body porosity of the third body region is greater than the first body porosity, and the third body porosity is less than the second body porosity. ### Claim 4 (depends on 1) The brush of claim 1, further comprising a plurality of brushing elements disposed on the body, the brushing elements comprising a second polymer material. ### Claim 5 (depends on 4) The brush of claim 4, wherein the brushing elements comprise a plurality of element holes having a first element region, wherein a first element porosity of the first element region is greater than about 70%, and the channel is fluidly coupled to the plurality of element holes. ### Claim 6 A structure embodied in a machine readable medium used in a design process, the structure comprising: a brush, comprising: a body comprising a first polymer material comprising a plurality of body holes, the plurality of body holes having a first body region, wherein a first body porosity of the first body region is greater than about 70%; and a channel disposed in the body, the channel fluidly coupled to the plurality of body holes. ### Claim 7 (depends on 6) The structure of claim 6, wherein the structure resides on storage medium as a data format used for an exchange of layout data. ### Claim 8 (depends on 6) The structure of claim 6, wherein the structure includes at least one of test data files, characterization data, verification data, or design specifications. ### Claim 9 (depends on 6) The structure of claim 6, wherein the plurality of body holes has a second body region, and a second body porosity of the second body region is greater than the first body porosity. ### Claim 10 (depends on 6) The structure of claim 6, wherein the brush further comprises a plurality of brushing elements disposed on the body, the brushing elements comprising a second polymer material. ### Claim 11 A method of forming a brush, comprising: forming a body of the brush using a three-dimensional (3D) printing process, the body comprising a first solid material comprising a plurality of body holes, the plurality of body holes having a first body region, wherein a first body porosity of the first body region is greater than about 70%; and forming a channel in the body of the brush using a 3D printing process, the channel fluidly coupled to the body plurality of holes. ### Claim 12 (depends on 11) The method of claim 11, wherein the 3D printing process comprises: exposing a surface of a printing liquid to treatment emission, such that at least a portion of the printing liquid is converted to a solid material; and raising a support member coupled to the solid material while a time-varying treatment emission is applied to the surface. ### Claim 13 (depends on 12) The method of claim 12, wherein the plurality of body holes has a second body region, and a second body porosity of the second body region is greater than the first body porosity. ### Claim 14 (depends on 13) The method of claim 13, wherein the first solid material has a third body region, a third body porosity of the third body region is greater than the first body porosity, and the third body porosity is less than the second body porosity. ### Claim 15 (depends on 12) The method of claim 12, wherein the time-varying treatment emission comprises ultraviolet (UV) light. ### Claim 16 (depends on 12) The method of claim 12, wherein the printing liquid comprises a photopolymer. ### Claim 17 (depends on 12) The method of claim 12, further comprising forming a plurality of brushing elements disposed on the body using a 3D printing process, each of the brushing elements comprising the first solid material comprising a plurality of element holes, the plurality of element holes having a first element region, wherein a first element porosity of the first element region is greater than about 70%. ### Claim 18 (depends on 17) The method of claim 17, wherein the channel is fluidly coupled to the plurality of element holes. ### Claim 19 (depends on 12) The method of claim 12, wherein the first body region comprises a random distribution of holes. ### Claim 20 (depends on 19) The method of claim 19, wherein the random distribution of holes is at least partially created by waves at the surface of the printing liquid.