Apparatus for positioning and clamped curing
AssigneeASML Netherland B.V.
InventorsMartin Dieter Nico PETERS, Marcellus Antonius DE FOLTER
Life of this patent
Estimating the term…
Abstract
An apparatus including: a first gripping member having a first magnetic element and moveable between a first position and a second position; a first biasing member configured to bias the first gripping member toward the first position; and a second magnetic element selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position, and a second mode, in which the second magnetic element does not overcome the first biasing member such that the first gripping member rests in the first position.
Claims26
An apparatus comprising:
- a first gripping member comprising a first magnetic element and moveable between a first position of the first gripping member and a second position of the second gripping member;
- a first biasing member configured to bias the first gripping member toward the first position of the first gripping member;
- and
- a second magnetic element selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position of the first gripping member, and a second mode, in which the second magnetic element does not overcome the first biasing member such that the first gripping member rests in the first position of the first gripping member.
(canceled)
(canceled)
A cassette for use in a pellicle assembly, the cassette comprising:
- a pressure plate comprising at least one gripping apparatus configured to grip a pellicle;
- a base member configured to support a pellicle frame;
- and
- a hood,
- wherein the pressure plate is arranged so as to rest on the base member, and the hood is arranged so as to cover the pressure plate and rest on the base member.
-22. (canceled)
A pellicle cassette assembly apparatus, comprising a pressure plate lift and a kinematic mount, wherein the kinematic mount is configured to move so as to be positioned below the pressure plate lift, and the pressure plate lift is configured to lower a pressure plate onto a base member positioned on the kinematic mount and subsequently release the pressure plate.
A computer-implemented method for curing a pellicle, the method comprising causing a pellicle cassette assembly tool to:
- retrieve a pellicle fixture from a fixture carrier;
- arrange a pellicle frame on a base member of a pellicle cassette;
- attach the pellicle fixture and a pellicle film to the pellicle frame using an adhesive;
- apply pressure to the pellicle fixture and the pellicle film using a pressure plate arranged to rest on the base member;
- and
- arrange a hood over the pressure plate such that it rests on the pressure plate and on the base member.
-27. (canceled)
A pellicle assembly tool comprising a pellicle cassette assembly tool configured to assemble a pellicle cassette and feed the cassette to a carousel configured to hold a plurality of pellicle cassettes for storage while the pellicle cassette assembly tool assembles further pellicle cassettes.
A cassette for use in a pellicle assembly, the cassette comprising:
- a base member;
- an intermediate member configured to support a pellicle fixture at a predetermined position within the cassette;
- and
- a pressure plate comprising at least one pressure finger configured to apply pressure to a pellicle film and/or the pellicle fixture,
- wherein, in a use, the intermediate member is disposed between the base member and the pressure plate.
-37. (canceled)
A computer-implemented method of assembling a cassette for curing a pellicle, the method comprising causing a cassette assembly apparatus to:
- arrange a base member in a field of view of at least one imaging apparatus;
- align a pellicle frame with the field of view and positioning the pellicle frame on the base member;
- and
- align a pellicle film with the pellicle frame and positioning the pellicle film on the pellicle frame.
-42. (canceled)
Dependencies are inferred from the claim text.