A nanocomposite mold for thermal nanoimprinting and method for producing the same
AssigneeB.G. Negev Technologies and Applications Ltd., At Ben-Gurion University
InventorsMark SCHVARTZMAN, Viraj BHINGARDIVE, Liran MENAHEM
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Abstract
The invention relates to a nanocomposite elastic mold for thermal nanoimprint, the mold comprising an elastic substrate, to which a plurality of rigid individual nanofeatures are bonded. The bonding of the rigid individual nanofeatures to the elastic substrate is performed by a process which uses a sacrificial substrate and a sacrificial coating.
Claims24
A method for producing a nanocomposite elastic mold for thermal nanoimprinting, comprising:
- a. providing a sacrificial rigid substrate which is made of a rigid material;
- b. coating the rigid sacrificial substrate by a sacrificial coating;
- c. attaching a rigid image layer to the sacrificial coating;
- d. shaping a plurality of individual nanofeatures within the rigid layer;
- e. covering the nanofeatures by an adhesive layer;
- f. separating an intermediate unit from a structure formed so far, said intermediate unit comprising said sacrificial coating, said adhesive layer, and said individual nanofeatures that are contained within said adhesive layer;
- g. removing said sacrificial coating from said intermediate unit to form a remained intermediate unit;
- h. attaching said remained intermediate unit to an elastic substrate;
- and
- i. removing said adhesive layer to form said nanocomposite elastic mold.
A nanocomposite elastic mold for thermal nanoimprint, comprising an elastic substrate, to which a plurality of rigid individual nanofeatures are bonded.
Dependencies are inferred from the claim text.