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US 2021/0268680 A1Published application
Method and apparatus for substrate stripping
AssigneeHighcon Systems Ltd.
InventorsDavid BEN-DAVID, Eli IRENI, Michael ZIMMER
Life of this patent
Estimating the term…
Abstract
Methods and apparatus for stripping away portions of substrate are disclosed herein. In some embodiments, a flexible and/or soft impact-element(s) rotates around a rotation axis to drive a peripheral portion across a substrate plane of the substrate and/or to repeatedly collide with the substrate. At least some of the collisions are effective to partially dislodge or to strip away portion(s) of substrate.
Claims25
1-6 (canceled)
An apparatus for stripping away portions of a substrate, the apparatus comprising:
- a. a substrate handling arrangement adapted to horizontally support a flat, thin substrate so as to define a substrate-plane;
- and
- b. a first and second stripping assemblies respectively defining first and second rotation axes that are disposed on opposite sides of the substrate plane, wherein:
- i. the first stripping assembly comprises:
- A. a first impact-element-set of one or more flexible impact-elements that are each disposed around the first rotation axis;
- and
- B. a first rotation-drive positioned and configured to rotate each impact-element of the first impact-element-set around the first rotation-axis so as to repeatedly drive a peripheral portion of each impact-element of the first impact-element-set across the substrate-plane;
- ii. the second stripping assembly comprises:
- A. a second impact-element-set of one or more flexible impact-elements that are each disposed around the first rotation axis;
- and
- B. a second rotation-drive positioned and configured to rotate each impact-element of the second impact-element-set around the second rotation-axis so as to repeatedly drive a peripheral portion of each impact-element of the second impact-element-set across the substrate-plane;
- wherein the first and second stripping assemblies are configured so that during operation when substrate is present on the substrate plane:
- i. an impact element of the first impact-element-set collides with the substrate so as to rotate a portion of the substrate out of the substrate plane so that the rotated potion is partially dislodged from the remaining substrate portion;
- and
- ii. subsequently, an impact element of the second impact-element-set completely disengages the partially dislodged rotated portion of substrate from the remaining substrate portion.
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21-44. (canceled)
Dependencies are inferred from the claim text.