US 2021/0268670 A1 · PART TRANSPORTING DEVICE AND PROCESSING SYSTEM

Abstract

A part transporting device for transporting a consumable part includes a part housing, a container, a robot arm, and a moving mechanism. The part housing accommodates an unused consumable part and a used consumable part. The container has an opening to be connected to a processing device and a gate valve for opening or closing the opening, the container being configured to accommodate the part housing. The robot arm is provided in the container and has at least one end effector at a tip end thereof, the robot arm transferring the used consumable part from the processing device through the opening to accommodate the used consumable part in the part housing and transferring the unused consumable part from the part housing to load the unused consumable part into the processing device through the opening. The moving mechanism has a power source and is configured to move the part transporting device.

Claims19

Dependent claims

A part transporting device for transporting a consumable part, comprising:

a part housing configured to accommodate an unused consumable part and a used consumable part;
a container having an opening to be connected to a processing device and a gate valve for opening or closing the opening, the container being configured to accommodate the part housing;
a robot arm provided in the container and having at least one end effector at a tip end thereof, the robot arm transferring the used consumable part from the processing device through the opening to accommodate the used consumable part in the part housing and transferring the unused consumable part from the part housing to load the unused consumable part into the processing device through the opening;
and
a moving mechanism having a power source and configured to move the part transporting device.

2 more elements

A processing system comprising:

a processing device having a consumable part and configured to process a substrate;
a part transporting device configured to transport the consumable part;
and
a control device configured to control the processing device and the part transporting device,
wherein the part transporting device includes
a part housing configured to accommodate an unused consumable part and a used consumable part,
a container having an opening to be connected to the processing device and a gate valve for opening or closing the opening, the container being configured to accommodate the part housing,
a robot arm provided in the container and having at least one end effector at a tip thereof, the robot arm transferring the used consumable part from the processing device through the opening to accommodate the used consumable part in the part housing and transferring the unused consumable part from the part housing to load the unused consumable part into the processing device through the opening, and
a moving mechanism having a power source and configured to move the part transporting device.

6 more elements

Dependencies are inferred from the claim text.

Part transporting device and processing system

Life of this patent

Part transporting device and processing system

Life of this patent

Abstract

Claims19