Electrostatic chuck device
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorTakashi SATO
Life of this patent
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Abstract
An electrostatic chuck device (1) including: an electrostatic chuck member (2) formed of ceramics; a temperature control base member (3) formed of metal; and a power supply terminal (16) which is inserted in the temperature control base member (3) and applies a voltage to an electrode for electrostatic attraction (13) which is provided on the electrostatic chuck member (2), the electrode for electrostatic attraction (13) and the power supply terminal (16) are connected with each other via a conductive adhesive layer (17), the conductive adhesive layer (17) contains a carbon fiber and a resin, and the carbon fiber has an aspect ratio of 100 or higher.
Claims11
An electrostatic chuck device comprising:
- an electrostatic chuck member formed of ceramics;
- a temperature control base member formed of metal;
- and
- a power supply terminal which is inserted in the temperature control base member and applies a voltage to an electrode for electrostatic attraction which is provided on the electrostatic chuck member,
- wherein
- the electrode for electrostatic attraction and the power supply terminal are connected with each other via a conductive adhesive layer,
- the conductive adhesive layer contains a carbon fiber and a resin, and
- the carbon fiber has an aspect ratio of 100 or higher.
Dependencies are inferred from the claim text.