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US 2021/0268554 A1Published application
System dedicated for parts cleaning
AssigneeASM IP Holding B.V.
InventorYukihiro Mori
Life of this patent
Estimating the term…
Abstract
Examples of a system dedicated for parts cleaning includes a gas supply apparatus configured to supply a cleaning gas, a first adapter connected to a gas supply port of the gas supply apparatus, an exhaust system configured to exhaust the gas supplied from the gas supply apparatus, and a second adapter connected to a gas inlet of the exhaust system.
Claims11
A system dedicated for parts cleaning, comprising:
- a gas supply apparatus configured to supply a cleaning gas;
- a first adapter connected to a gas supply port of the gas supply apparatus;
- an exhaust system configured to exhaust the gas supplied from the gas supply apparatus;
- and
- a second adapter connected to a gas inlet of the exhaust system.
2 more elements
Dependencies are inferred from the claim text.