Semiconductor structure and preparation method thereof

Abstract

The present application discloses a semiconductor structure and a preparation method. The semiconductor structure includes a heterojunction, including at least two sets of channel layers and barrier layers stacked sequentially; a first p-type semiconductor, disposed in a gate region of the heterojunction and extended to a bottom of the heterojunction; and a second p-type semiconductor, disposed on the gate region of the heterojunction. By providing a heterojunction including at least two sets of channel layers and barrier layers stacked sequentially, multilayer 2DEG is realized by using multilayer channel layers and barrier layers to increase the concentration of 2DEG, thereby reducing the resistance. Since a first p-type semiconductor is disposed in a gate region of the heterojunction, the p-type semiconductor materials in the first p-type semiconductor are used to deplete the 2DEG to realize normally-off and increase the threshold voltage.

Dependencies are inferred from the claim text.