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US 2021/0265484 A1Published application
Methods of Re-using a Silicon Carbide Substrate
AssigneeInfineon Technologies AG
InventorsHans-Joachim Schulze, Roland Rupp, Francisco Javier Santos Rodriguez
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Abstract
A method includes providing a layer of porous silicon carbide supported by a silicon carbide substrate, providing a layer of epitaxial silicon carbide on the layer of porous silicon carbide, forming a plurality of semiconductor devices in the layer of epitaxial silicon carbide, and separating the substrate from the layer of epitaxial silicon carbide at the layer of porous silicon carbide. Additional methods are described.
Claims20
A method, comprising:
- providing a layer of porous silicon carbide supported by a silicon carbide substrate;
- providing a layer of epitaxial silicon carbide on the layer of porous silicon carbide;
- forming a plurality of semiconductor devices in the layer of epitaxial silicon carbide;
- and
- separating the substrate from the layer of epitaxial silicon carbide at the layer of porous silicon carbide.
2 more elements
A method, comprising:
- providing an interface layer supported by a silicon carbide substrate, the interface layer comprising silicon carbide with pores that form an interconnected network;
- providing a layer of epitaxial silicon carbide on the interface layer;
- forming a plurality of semiconductor devices in the layer of epitaxial silicon carbide;
- and
- separating the substrate from the layer of epitaxial silicon carbide at the interface layer.
2 more elements
A method, comprising:
- providing an interface layer supported by a silicon carbide substrate, the interface layer comprising silicon carbide with pores and a light-absorbing material;
- providing a layer of epitaxial silicon carbide on the interface layer;
- forming a plurality of semiconductor devices in the layer of epitaxial silicon carbide;
- and
- separating the substrate from the layer of epitaxial silicon carbide at the interface layer, by damaging the interface layer using laser light absorbed by the light-absorbing material.
2 more elements
Dependencies are inferred from the claim text.