Solid-state image pickup device and electronic apparatus
AssigneeSony Group Corporation
InventorsAtsushi MASAGAKI, Yusuke TANAKA
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to a solid-state image pickup device and an electronic apparatus that are capable of preventing leakage of charges between adjacent pixels. A plurality of pixels perform photoelectric conversion on light incident from a back surface via different on-chip lenses for each pixel. A pixel separation wall is formed between pixels adjacent to each other, and includes a front-side trench formed from a front surface and a backside trench formed from the back surface. A wiring layer is provided on the front surface. The present disclosure is applicable to, for example, a backside illuminated CMOS image sensor.
Claims17
1-20. (canceled)
A light detecting device, comprising:
- a first photoelectric conversion region disposed in a substrate wherein the substrate comprises a first surface and a second surface opposite the first surface, the first surface being a light incident surface of the substrate;
- a second photoelectric conversion region disposed in the substrate and adjacent to the first photoelectric conversion region;
- a first on-chip lens disposed above the first surface of the substrate, the first on-chip lens corresponding to the first photoelectric conversion region;
- and
- a second on-chip lens disposed above the first surface of the substrate and disposed adjacent to the first on-chip lens, the second on-chip lens corresponding to the second photoelectric conversion region,
- wherein the first photoelectric conversion region and the first on-chip lens are a part of a first pixel and the second photoelectric conversion region and the second on-chip lens are a part of a second pixel,
- the light detection device further comprising:
- a first wall disposed between the first pixel and the second pixel, wherein a part of the first wall is disposed at the first surface of the substrate;
- a second wall disposed between the first pixel and the second pixel, wherein a part of the second wall is disposed at the second surface of the substrate;
- and
- a first semiconductor region disposed in the substrate, wherein, in a cross-sectional view, the first semiconductor region being disposed between a first portion of the second wall and a second portion of the second wall.
An electronic apparatus, comprising:
- a lens;
- a digital signal processing circuitry;
- and
- a light detecting device, comprising:
- a first photoelectric conversion region disposed in a substrate wherein the substrate comprises a first surface and a second surface opposite the first surface, the first surface being a light incident surface of the substrate;
- a second photoelectric conversion region disposed in the substrate and adjacent to the first photoelectric conversion region;
- a first on-chip lens disposed above the first surface of the substrate, the first on-chip lens corresponding to the first photoelectric conversion region;
- and
- a second on-chip lens disposed above the first surface of the substrate and disposed adjacent to the first on-chip lens, the second on-chip lens corresponding to the second photoelectric conversion region,
- wherein the first photoelectric conversion region and the first on-chip lens are a part of a first pixel and the second photoelectric conversion region and the second on-chip lens are a part of a second pixel,
- the light detection device further comprising:
- a first wall disposed between the first pixel and the second pixel, wherein a part of the first wall is disposed at the first surface of the substrate;
- a second wall disposed between the first pixel and the second pixel, wherein a part of the second wall is disposed at the second surface of the substrate;
- and
- a first semiconductor region disposed in the substrate, wherein, in a cross-sectional view, the first semiconductor region being disposed between a first portion of the second wall and a second portion of the second wall.
Dependencies are inferred from the claim text.