US 2021/0265405 A1 · IMAGING DEVICE, IMAGING APPARATUS, AND ELECTRONIC DEVICE

Abstract

The present disclosure relates to an imaging device, an imaging apparatus, and an electronic device capable of light-shielding a charge accumulation unit at low cost, while maintaining a charge transfer path from a photodiode to a charge accumulation unit. A depth of a trench that forms a trench buried film having a light-shielding characteristic for preventing color mixture of the photodiodes is adjusted according to a contact amount of a reactive gas by adjusting, among the shapes of a photomask pattern, a width of the trench through which the reactive gas flows or the number of intersections of the trenches at a portion forming a trench in which the trench buried film is formed. As a result, the trench buried films having a plurality of depths can be formed by a single dry etching with one mask pattern, and the manufacturing cost is reduced. Application to an imaging device is possible.

Claims11

Dependent claims

An imaging device comprising:

a plurality of photodiodes arranged in an array and generating an electric charge according to an amount of incident light;
a charge accumulation unit that accumulates the electric charge transferred from each of the photodiodes;
and
a light shielding wall that separately light-shields the photodiode and the charge accumulation unit, wherein
the light shielding wall is configured to surround the charge accumulation unit, with a part of the light shielding wall having a first depth and other parts of the light shielding wall having a second depth, and the first depth and the second depth of the light shielding wall are formed by dry etching with a photomask pattern using a processing conversion difference caused by a microloading effect.

2 more elements

Dependencies are inferred from the claim text.

Imaging device, imaging apparatus, and electronic device

Life of this patent

Imaging device, imaging apparatus, and electronic device

Life of this patent

Abstract

Claims11