Semiconductor device and manufacturing method of the semiconductor device
AssigneeSK hynix Inc.
InventorsChanghan Kim, In Ku KANG, Sun Young KIM
Life of this patent
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AssigneeSK hynix Inc.
InventorsChanghan Kim, In Ku KANG, Sun Young KIM
Estimating the term…
A semiconductor device includes a stacked structure including insulating layers and conductive layers alternately stacked on each other, a hard mask pattern located on the stacked structure, a channel structure passing through the hard mask pattern and the stacked structure, insulating patterns interposed between the insulating layers and the channel structure and each including a first surface and a second surface, wherein the first surface faces each of the insulating layers and is flat and the second surface faces the channel structure and includes a curved surface, and a memory layer interposed between the stacked structure and the channel structure and filling a space between the insulating patterns, wherein a sidewall of each of the conductive layers is located on an extending line of a sidewall of the hard mask pattern and the insulating patterns protrude farther towards the channel structure than the sidewall of the hard mask pattern.
A semiconductor device, comprising:
Dependencies are inferred from the claim text.