Memory structure and method for manufacturing the same
AssigneeNanya Technology Corporation
InventorJhen-Yu Tsai
Life of this patent
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AssigneeNanya Technology Corporation
InventorJhen-Yu Tsai
Estimating the term…
Provided are a memory structure and a method for manufacturing the same. The memory structure includes a capacitor and a transistor disposed thereon and electrically connected thereto. The transistor includes a first and a source/drain layers, a channel pillar, a gate, a gate dielectric layer, a doped layer, and a spacer layer. The first source/drain layer is electrically connected to the capacitor. The channel pillar is on the first source/drain layer. The gate is on a sidewall of the channel pillar. The gate dielectric layer is between the gate and the channel pillar. The doped layer is on the sidewall of the channel pillar and above the gate. The spacer layer is between the gate and the first source/drain layer and between the gate and the doped layer. The second source/drain layer is on or in the channel pillar.
A memory structure, comprising:
A method for manufacturing a memory structure, comprising:
Dependencies are inferred from the claim text.