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US 2021/0265286 A1Published application
Chip corner areas with a dummy fill pattern
AssigneeGlobalFoundries U.S. Inc.
InventorsQiang Lei, Bo Bai
Life of this patent
Estimating the term…
Abstract
Structures for a corner area of a chip and methods of fabricating a structure for a corner area of a chip. A chip includes an active circuit region, an integrated circuit in the active circuit region, and a corner area. The corner area includes dummy structures that provide dummy fill.
Claims20
A structure comprising:
- a chip including an active circuit region, an integrated circuit in the active circuit region, and a corner area;
- and
- a plurality of dummy structures positioned in the corner area.
A structure comprising:
- a substrate including a plurality of chips and a plurality of scribe lines arranged to surround each chip, each chip including an active circuit region, an integrated circuit in the active circuit region, and a corner area;
- and
- a plurality of dummy structures positioned in the corner area of each chip.
A method comprising:
- forming a chip including an active circuit region, an integrated circuit in the active circuit region, and a corner area;
- and
- forming a plurality of dummy structures positioned in the corner area.
Dependencies are inferred from the claim text.