Back to results
US 2021/0265221 A1Published application
Method for forming a semiconductor structure using dehydrating chemical, and method for forming a semiconductor structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCHUNG-CHIEH LEE, CHI-MING YANG, CHYI SHYUAN CHERN
Life of this patent
Estimating the term…
Abstract
The present disclosure provides a method for forming a semiconductor structure, including dispensing a dehydrating chemical over a fin of a substrate, wherein the dehydrating chemical includes a first chemical, and a second chemical having a melting point greater than the melting point of the first chemical, and solidifying the dehydrating chemical.
Claims20
A method for forming a semiconductor structure, comprising:
- dispensing a dehydrating chemical over a fin of a substrate, wherein the dehydrating chemical comprises:
- a first chemical;
- and
- a second chemical having a melting point greater than the melting point of the first chemical;
- and
- solidifying the dehydrating chemical.
3 more elements
A method for forming a semiconductor structure, comprising:
- dispensing a dehydrating chemical on a surface of a substrate in a chamber, wherein the dehydrating chemical comprises:
- a first chemical;
- and
- a second chemical having a saturated vapor pressure different from the saturated vapor pressure of the first chemical;
- removing the first chemical, wherein at least a portion of the second chemical is remained over the substrate after the first chemical is removed;
- and
- solidifying the second chemical.
4 more elements
A method for dehydrating a semiconductor structure, comprising:
- dispensing a dehydrating chemical on a surface of a substrate in a chamber, wherein the dehydrating chemical comprises:
- a first chemical;
- and
- a second chemical having a melting point greater than the melting point of the first chemical;
- detecting a first environment temperature of a first environment, wherein the dehydrating chemical is transported in the first environment prior to being dispensed on the substrate;
- detecting a second environment temperature of a second environment, wherein the dehydrating chemical is transported in the second environment subsequent to being dispensed on the substrate;
- and
- adjusting a mixing ratio of the first chemical and the second chemical in the dehydrating chemical according to the first environment temperature and the second environment temperature.
5 more elements
Dependencies are inferred from the claim text.