Ceramic structure and wafer system
AssigneeKYOCERA Corporation
InventorsYasunori KAWANABE, Yoshihiro OKAWA
Life of this patent
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Abstract
A heater includes a base body, a resistance heating element, and a terminal part. The base body is made of ceramic and is plate shaped including an upper surface on which a wafer is superimposed and a lower surface on an opposite side to the upper surface. The resistance heating element is located inside the base body. The terminal part is electrically connected to the resistance heating element, is at least partially located inside the base body, and is exposed from, the lower surface of the base body to an exterior of the base body. The lower surface of the base body includes an adjacent region which surrounds the terminal part. The adjacent region includes an inclined surface in a portion reaching the terminal part.
Claims19
A ceramic structure comprising:
- a plate-shaped base body made of ceramic and comprising an upper surface on which a wafer is superimposed and a lower surface on an opposite side to the upper surface;
- an internal conductor which is located inside the base body;
- and
- a terminal part which is electrically connected to the internal conductor, is at least partially located inside the base body, and is exposed from the lower surface of the base body to an exterior of the base body, wherein
- the lower surface of the base body comprises an adjacent region surrounding the terminal part, and
- the adjacent region comprises an inclined surface in a portion reaching the terminal part.
Dependencies are inferred from the claim text.