Carrier tray
AssigneeDisco Corporation
InventorKentaro IIZUKA
Life of this patent
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Abstract
A carrier tray includes a housing, an ingot accommodating recess that accommodates a semiconductor ingot, and a wafer accommodating recess that accommodates a wafer. The housing has an upper wall, a lower wall, a pair of side walls connecting the upper wall and the lower wall to each other, and a tunnel defined by the upper wall, the lower wall, and the pair of side walls. A plurality of levers each of which has a point of application projecting from a bottom surface of the ingot accommodating recess, a point of action projecting from a side surface of the ingot accommodating recess, and a fulcrum formed between the point of application and the point of action are each attached to the housing so as to be rotatable around the fulcrum.
Claims2
A carrier tray to be used in a wafer forming apparatus for forming a wafer from a semiconductor ingot, the carrier tray comprising:
- a housing that includes an upper wall, a lower wall, a pair of side walls connecting the upper wall and the lower wall to each other, and a tunnel defined by the upper wall, the lower wall, and the pair of side walls;
- an ingot accommodating recess that is formed in the upper wall of the housing and accommodates the semiconductor ingot;
- a wafer accommodating recess that is formed in the lower wall of the housing and accommodates a wafer;
- and
- a plurality of levers each of which has a point of application projecting from a bottom surface of the ingot accommodating recess, a point of action projecting from a side surface of the ingot accommodating recess, and a fulcrum formed between the point of application and the point of action, each of the levers being attached to the housing so as to be rotatable around the fulcrum,
- wherein, when the semiconductor ingot is accommodated in the ingot accommodating recess, the points of application of the levers are operated by a weight of the semiconductor ingot itself, and a side surface of the semiconductor ingot is supported by the points of action of the levers.
Dependencies are inferred from the claim text.