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US 2021/0265183 A1Published application
Dummy wafer
AssigneeTokyo Electron Limited
InventorsShigeru KASAI, Yutaka AKAIKE, Yoshiyasu KATO, Hiroyuki NAKAYAMA, Hiroaki KOMIYA
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Abstract
A dummy wafer includes a planar heater and a pair of plate-shaped members formed of an aluminum alloy, aluminum, or silicon carbide, wherein the planar heater is sandwiched by the plate-shaped members.
Claims7
A dummy wafer comprising:
- a planar heater;
- and
- a pair of plate-shaped members formed of an aluminum alloy, aluminum, or silicon carbide, wherein the planar heater is sandwiched by the plate-shaped members.
Dependencies are inferred from the claim text.