US 2021/0265170 A1 · SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Substrate processing method and substrate processing apparatus

AssigneeTokyo Electron Limited

InventorsSeiichi WATANABE, Kazuki NARISHIGE, Xinhe Jerry LIM, Jianfeng XU, Yi Hao NG, Zhenkang Max LIANG, Yujun Nicholas LOO, Chiew Wah YAP, Bin ZHAO, Chai Jin CHUA, Takehito WATANABE, Koji KAWAMURA, Kenji KOMATSU, Li JIN, Wee Teck TAN, Dali LIU

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Abstract

A substrate processing method performed in a chamber of a substrate processing apparatus is provided. The chamber includes a substrate support, an upper electrode, and a gas supply port. The substrate processing method includes (a) providing the substrate on the substrate support; (b) supplying a first processing gas into the chamber; (c) continuously supplying an RF signal into the chamber while continuously supplying a negative DC voltage to the upper electrode, to generate plasma from the first processing gas in the chamber; and (d) supplying a pulsed RF signal while continuously supplying the negative DC voltage to the upper electrode, to generate plasma from the first processing gas in the chamber. The process further includes repeating alternately repeating the steps (c) and (d), and a time for performing the step (c) once is 30 second or shorter.

Claims17

Dependent claims

A substrate processing method comprising:

(a) providing a substrate on a substrate support disposed in a chamber;
(b) supplying a first processing gas into the chamber;
(c) continuously supplying an RF signal into the chamber while continuously supplying a negative DC voltage to an upper electrode provided to face the substrate support, to generate plasma from the first processing gas in the chamber;
and
(d) supplying a pulsed RF signal while continuously supplying the negative DC voltage to the upper electrode, to generate plasma from the first processing gas,
wherein (c) and (d) are alternately repeated, and
a time for performing (c) once is 30 second or shorter.

4 more elements

Dependencies are inferred from the claim text.