Plasma processing apparatus and method of measuring temperature of members
AssigneeTokyo Electron Limited
InventorKoji KAWAMURA
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Abstract
A plasma processing apparatus having a processing container and an electrode includes: a preprocessing part configured to perform a preprocessing of igniting plasma to increase a temperature of members within the processing container; a power application part configured to apply a radio frequency (RF) power to the electrode without igniting plasma after the preprocessing is performed; a measuring part configured to measure a physical quantity related to the RF power applied by the power application part; and a determination part configured to determine whether or not the temperature of the members within the processing container is saturated based on the physical quantity related to the RF power measured by the measuring part.
Claims8
A plasma processing apparatus having a processing container and an electrode, the plasma processing apparatus comprising:
- a preprocessing part configured to perform a preprocessing of igniting plasma to increase a temperature of members within the processing container;
- a power application part configured to apply a radio frequency (RF) power to the electrode without igniting plasma after the preprocessing is performed;
- a measuring part configured to measure a physical quantity related to the RF power applied by the power application part;
- and
- a determination part configured to determine whether or not the temperature of the members within the processing container is saturated based on the physical quantity related to the RF power measured by the measuring part.
A method of determining a temperature of members in a plasma processing apparatus having a processing container and an electrode, the method comprising:
- performing a preprocessing of igniting plasma to increase the temperature of the members within the processing container;
- applying a radio frequency (RF) power to the electrode without igniting plasma and measuring a physical quantity related to the applied RF power after the preprocessing is performed;
- and
- determining whether or not the temperature of the members within the processing container is saturated based on the measured physical quantity related to the RF power.
Dependencies are inferred from the claim text.