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US 2021/0265131 A1Published application
Edge detection system
AssigneeFractilia, LLC
InventorChris Mack
Life of this patent
Estimating the term…
Abstract
An edge detection system is provided that generates a scanning electron microscope (SEM) linescan image of a pattern structure including a feature with edges that require detection. The edge detection system includes an inverse linescan model tool that receives measured linescan information for the feature from the SEM. In response, the inverse linescan model tool provides feature geometry information that includes the position of the detected edges of the feature.
Claims24
A method, comprising:
- receiving measured linescan information describing a pattern structure of a feature;
- applying the received measured linescan information to an inverse linescan model that relates measured linescan information to feature geometry information;
- identifying, based at least in part on the applying the received measured linescan model to the inverse linescan model, feature geometry information that describes a feature that would produce a linescan corresponding to the received measured linescan information;
- and
- determining, at least in part using the inverse linescan model, feature edge positions of the identified feature.
2 more elements
A method, comprising:
- receiving a first image of a pattern structure;
- generating, based at least in part on the first image of the pattern structure, measured linescan information describing a pattern structure of a feature;
- applying the measured linescan information to an inverse linescan model that relates measured linescan information to feature geometry information;
- identifying, based at least in part on the applying the measured linescan model to the inverse linescan model, feature geometry information that describes a feature that would produce a linescan corresponding to the received measured linescan information;
- and
- determining, at least in part using the inverse linescan model, feature edge positions of the identified feature.
3 more elements
An edge detection system, comprising:
- an imaging device configured to generate a first image of a pattern structure, wherein the first image of the pattern structure includes image noise;
- and
- a processor, coupled to the imaging device, the processor configured to:
- generating, based at least in part on the first image of the pattern structure, measured linescan information describing a pattern structure of a feature;
- apply the measured linescan information to an inverse linescan model that relates measured linescan information to feature geometry information;
- identify, based at least in part on the applying the measured linescan model to the inverse linescan model, feature geometry information that describes a feature that would produce a linescan corresponding to the received measured linescan information;
- and
- determine, at least in part using the inverse linescan model, feature edge positions of the identified feature.
5 more elements
Dependencies are inferred from the claim text.