Information processing system and simulation method
AssigneeTokyo Electron Limited
InventorsMasakazu YAMAMOTO, Tadashi ENOMOTO
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Abstract
An information processing system includes: a physical sensor data acquisition unit configured to acquire physical sensor data measured by a semiconductor manufacturing apparatus that executes a process according to a process parameter; a simulation execution unit configured to execute a simulation by a simulation model of the semiconductor manufacturing apparatus according to the process parameter and calculate virtual sensor data and virtual process result data; and a display controller that visualizes a process state of the semiconductor manufacturing apparatus and displays the process state on a display unit during the execution of the process using the physical sensor data, the virtual sensor data, and the virtual process result data.
Claims16
An information processing system comprising:
- physical sensor data acquisition circuitry configured to acquire physical sensor data measured by a semiconductor manufacturing apparatus that executes a process according to a process parameter;
- simulation execution circuitry configured to execute a simulation by a simulation model of the semiconductor manufacturing apparatus according to the process parameter and calculate virtual sensor data and virtual process result data;
- and
- a display controller configured to visualize a process state of the semiconductor manufacturing apparatus and display the process state on a display during an execution of the process using the physical sensor data, the virtual sensor data, and the virtual process result data.
A simulation method comprising:
- acquiring physical sensor data measured by a semiconductor manufacturing apparatus that executes a process according to a process parameter;
- executing a simulation by a simulation model of the semiconductor manufacturing apparatus according to the process parameter to calculate virtual sensor data and virtual process result data;
- and
- visualizing a process state of the semiconductor manufacturing apparatus and displaying the process state on a display during an execution of the process using the physical sensor data, the virtual sensor data, and the virtual process result data.
Dependencies are inferred from the claim text.