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US 2021/0263348 A1Published application
Polarization switches including a phase change material
AssigneeGlobalFoundries U.S. Inc.
InventorsSteven M. Shank, Yusheng Bian, Ajey Poovannummoottil Jacob
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Abstract
Structures for a polarization switch and methods of fabricating a structure for a polarization switch. A waveguide core is located on a substrate. The waveguide core is composed of silicon nitride. An active layer is positioned proximate to a section of the waveguide core. The active layer composed of a phase change material having a first state with a first refractive index and a second state with a second refractive index.
Claims20
A structure comprising:
- a substrate;
- a first waveguide core on the substrate, the first waveguide core comprised of silicon nitride;
- and
- an active layer positioned proximate to a section of the first waveguide core, the active layer comprised of a phase change material having a first state with a first refractive index and a second state with a second refractive index.
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A method comprising:
- forming a waveguide core on a substrate;
- and
- forming an active layer positioned proximate to a section of the waveguide core,
- wherein the waveguide core is comprised of silicon nitride, and the active layer is comprised of a phase change material having a first state with a first refractive index and a second state with a second refractive index.
1 more element
Dependencies are inferred from the claim text.