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US 2021/0263298 A1Published application
Optical Module, Electronic Device, And Driving Method
AssigneeSeiko Epson Corporation
InventorsTomonori MATSUSHITA, Nozomu HIROKUBO
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Abstract
An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.
Claims2
An electronic device comprising:
- a wavelength variable interference filter including;
- a first reflective film,
- a second reflective film facing the first reflective film with a gap, and
- an actuator configured to change the gap, so that light of a wavelength corresponding to the gap is transmitted through the first reflective film and the second reflective film,
- a single imaging unit configured to detect the light transmitted from the wavelength variable interference filter;
- and
- a gap control unit including a storage unit that stores data representing a relationship between a voltage to be applied to the actuator and a wavelength of the light to be transmitted from the wavelength variable interference filter, the gap control unit being configured to cause the actuator to change the gap by applying the voltage to the actuator according to the data;
- wherein the wavelength variable interference filter and the single imaging unit are configured to have the light from the wavelength variable interference filter detected only by the single imaging unit,
- wherein the wavelength of the light belongs to one of at least a first wavelength region and a second wavelength region that is a longer wavelength region compared with the first wavelength region,
- and wherein in the relationship represented by the data, the voltage corresponds to a first size of the gap that allows the light of a first order having a first wavelength to be transmitted when the first wavelength belongs to the first wavelength region, and the voltage corresponds to a second size of the gap that allows the light of a second order having a second wavelength to be transmitted when the second wavelength belongs to the second wavelength region, the first order being higher than the second order.
7 more elements
Dependencies are inferred from the claim text.