Semiconductor device for ambient sensing including a cavity and a mechanical filtering structure
AssigneeSTMicroelectronics S.r.l.
InventorsMikel AZPEITIA URQUIA, Giorgio ALLEGATO
Life of this patent
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Abstract
A semiconductor device for ambient sensing including: a cap traversed by a hole; and a main body mechanically coupled to the cap so as to delimit a cavity, which is interposed between the main body and the cap. The main body includes a semiconductor body and a coupling structure, which is interposed between the semiconductor body and the cap and laterally delimits a channel, which fluidically couples the cavity and the hole. The channel performs a mechanical filtering that is finer than the mechanical filtering performed by the hole.
Claims20
A semiconductor device, comprising:
- a cap;
- a filtering hole extends through the cap, the filtering hole having a dimension;
- a cavity;
- and
- a main body coupled to the cap so as to delimit the cavity between the main body and the cap the main body includes:
- a semiconductor body;
- and
- a coupling structure between the semiconductor body and the cap;
- and
- a filtering channel fluidically couples the cavity and the hole, the filtering channel is laterally delimited by the coupling structure, the filtering channel has a first sidewall and a second sidewall opposite to the first sidewall, the filtering channel has a dimension that extends from the first sidewall to the second sidewall, the dimension is less than the dimension of the filtering hole;
- a first opening is delimited by the channel, the first opening is in fluid communication with the hole;
- and
- a second opening is delimited by the channel is in fluid communication with a part of the cavity and is laterally staggered from the first opening.
A method, comprising:
- forming a main body including a semiconductor body and a coupling structure that laterally delimits a channel;
- forming a cap traversed by a hole, forming the cap including:
- forming a primary body of the cap;
- and
- forming a projecting region extending from the cap;
- forming a cavity between the main body and the cap, positioning the coupling structure between the semiconductor body and the cap, and fluidically coupling the channel to the cavity and the hole by mechanically coupling the coupling structure of the main body to the projecting region of the cap.
A semiconductor device, comprising:
- a semiconductor body;
- a coupling structure on the semiconductor body;
- a cap on the semiconductor body and coupled to the coupling structure, the cap including:
- a primary body;
- and
- an extension portion extending from the primary body, the extension portion coupled to the coupling structure;
- a cavity between the semiconductor body and the cap;
- a hole extending into the cap to the coupling structure, the hole traverses the primary body and the projecting region;
- and
- a filtering window between the coupling structure and the cap, the filtering window in fluid communication with the hole and the cavity.
Dependencies are inferred from the claim text.