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US 2021/0262833 A1Published application
Scale
AssigneeMitutoyo Corporation
InventorsKosaku MIYAKE, Toshihiko AOKI
Life of this patent
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Abstract
A scale includes a base material, scale patterns arranged at a predetermined periodicity on a main surface of the base material, and a fluorine film that covers the scale patterns and is at least partly a monomolecular fluorine compound.
Claims13
A scale comprising:
- a base material;
- a plurality of scale patterns arranged at a predetermined periodicity on a main surface of the base material;
- and
- a fluorine film that covers the plurality of scale patterns and is at least partly a monomolecular fluorine compound.
1 more element
Dependencies are inferred from the claim text.