Paddle, processing apparatus having the paddle, and method of producing the paddle
AssigneeEbara Corporation
InventorsYasuyuki Masuda, Shao Hua Chang, Yoshitaka Mukaiyama, Masashi Shimoyama, Jumpei Fujikata
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Abstract
A paddle capable of reducing an influence of blocking the electric field and capable of improving its mechanical strength is disclosed. The paddle, which is configured to agitate a processing liquid in a processing tank by moving in the processing tank, includes a plurality of agitating beams that form a honeycomb structure. The honeycomb structure has a plurality of hexagonal through-holes formed by the plurality of agitating beams.
Claims10
A paddle for agitating a processing liquid in a processing tank by moving in the processing tank, comprising:
- a plurality of agitating beams that form a honeycomb structure, the honeycomb structure having a plurality of hexagonal through-holes formed by the plurality of agitating beams.
A processing apparatus for processing a workpiece, comprising:
- a processing tank for holding a processing liquid therein;
- a workpiece holder configured to hold the workpiece,
- a paddle configured to agitate the processing liquid in the processing tank, paddle being disposed in the processing tank;
- and
- a paddle-driving device configured to move the paddle,
- wherein the paddle comprises a plurality of agitating beams that form a honeycomb structure, the honeycomb structure having a plurality of hexagonal through-holes formed by the plurality of agitating beams.
A method of manufacturing a paddle for agitating a processing liquid in a processing tank by moving in the processing tank, comprising:
- storing a three-dimensional design data for the paddle in a memory of a three-dimensional printing machine;
- and
- producing the paddle based on the three-dimensional design data,
- wherein the paddle comprises a plurality of agitating beams that form a honeycomb structure, the honeycomb structure having a plurality of hexagonal through-holes formed by the plurality of agitating beams.
Dependencies are inferred from the claim text.